Inventor · disambiguated record
Masayoshi Imai
Also filed as: IMAI MASAYOSHI
13 granted patents·2 pending applications·55 citations·filing 2001–2021
87Inventor score
Top patents by PatentIndex Score
15 records- 0183US6951221B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2001·Granted Oct 4, 2005·22 cites·10 claims
- 0278US7479205B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Jan 20, 2009·23 cites·7 claims
- 0371US9666455B2Substrate cleaning apparatusEBARA CORP·Filed 2013·Granted May 30, 2017·2 cites·8 claims
- 0466US7267130B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Sep 11, 2007·7 cites·1 claims
- 0562US10500691B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2017·Granted Dec 10, 2019·0 cites·18 claims
- 0661US11495475B2Method of cleaning a substrateEBARA CORP·Filed 2020·Granted Nov 8, 2022·0 cites·7 claims
- 0750US10607862B2Substrate cleaning apparatusEBARA CORP·Filed 2017·Granted Mar 31, 2020·0 cites·3 claims
- 0850US2014190633A1Substrate cleaning apparatus and polishing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 0949US12463062B2Substrate processing apparatus, computer-readable storage medium storing a program, and substrate processing methodEBARA CORP·Filed 2021·Granted Nov 4, 2025·0 cites·17 claims
- 1048US11848216B2Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assemblyEBARA CORP·Filed 2021·Granted Dec 19, 2023·0 cites·13 claims
- 1148US7428907B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Granted Sep 30, 2008·1 cites·19 claims
- 1244US2004206379A1Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
- 1340US10229841B2Wafer drying apparatus and wafer drying methodEBARA CORP·Filed 2016·Granted Mar 12, 2019·0 cites·8 claims
- 1434US10438818B2Substrate processing apparatus and pipe cleaning method for substrate processing apparatusEBARA CORP·Filed 2015·Granted Oct 8, 2019·0 cites·13 claims
- 1532US10985037B2Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatusEBARA CORP·Filed 2018·Granted Apr 20, 2021·0 cites·8 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →