Inventor · disambiguated record
Mitsuru Fukagawa
Also filed as: FUKAGAWA MITSURU
7 granted patents·3 pending applications·61 citations·filing 2000–2013
82Inventor score
Files withWATANABE M & CO LTD4FUKAGAWA MITSURU1KK WATANABE SHOKO1KUSUHARA MASAKI1MOTOYAMA ENG WORKS1
Top patents by PatentIndex Score
10 records- 0192US7673856B2Vaporizer and various devices using the same and an associated vaporizing methodWATANABE M & CO LTD·Filed 2006·Granted Mar 9, 2010·18 cites·22 claims
- 0287US6540840B1Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDWATANABE M & CO LTD·Filed 2000·Granted Apr 1, 2003·32 cites·7 claims
- 0364US8486196B2Vaporizing apparatus and film forming apparatus provided with vaporizing apparatusTODA MASAYUKI·Filed 2008·Granted Jul 16, 2013·0 cites·13 claims
- 0463US6931203B2Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDMOTOYAMA ENG WORKS·Filed 2002·Granted Aug 16, 2005·5 cites·5 claims
- 0562US9644264B2Evaporation method and film deposition methodKK WATANABE SHOKO·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 0660US7246796B2Carburetor, various types of devices using the carburetor, and method of vaporizationWATANABE M & CO LTD·Filed 2002·Granted Jul 24, 2007·6 cites·6 claims
- 0745US7744698B2Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDWATANABE M & CO LTD·Filed 2002·Granted Jun 29, 2010·0 cites·8 claims
- 0844US2013291797A1VaporizerKUSUHARA MASAKI·Filed 2011·Application pending·0 cites
- 0941US2006278166A1Vaporizer, various devices using the same, and vaporizing methodYAMOTO HISAYOSHI·Filed 2003·Application pending·0 cites
- 1034US2006124179A1Raw solution feeding system for vaporizer and method of cleaning the raw solution feeding systemFUKAGAWA MITSURU·Filed 2003·Application pending·0 cites
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