Assignee
MOTOYAMA ENG WORKS
JP·8 granted patents·323 citations·filing 1987–2002
Top patents by PatentIndex Score
8 records- 0196US4828219AMetal diaphragm valveMOTOYAMA ENG WORKS·Filed 1987·Granted May 9, 1989·108 cites·16 claims
- 0282US5551477ADiaphragm-type flow control valve and manual control valve apparatusMOTOYAMA ENG WORKS·Filed 1994·Granted Sep 3, 1996·55 cites·1 claims
- 0381US5524865ADiaphragm valve structureMOTOYAMA ENG WORKS·Filed 1994·Granted Jun 11, 1996·45 cites·20 claims
- 0477US5653419ADiaphragm type high pressure shut-off valveMOTOYAMA ENG WORKS·Filed 1994·Granted Aug 5, 1997·40 cites·13 claims
- 0569US5516366ASupply control system for semiconductor process gassesMOTOYAMA ENG WORKS·Filed 1994·Granted May 14, 1996·28 cites·20 claims
- 0667US4953826AMetal diaphragm valveMOTOYAMA ENG WORKS·Filed 1989·Granted Sep 4, 1990·20 cites·9 claims
- 0763US6931203B2Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVDMOTOYAMA ENG WORKS·Filed 2002·Granted Aug 16, 2005·5 cites·5 claims
- 0861US6105933ADiaphragm valve structureMOTOYAMA ENG WORKS·Filed 1995·Granted Aug 22, 2000·22 cites·1 claims
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