Inventor · disambiguated record
Steven Gianoulakis
Also filed as: GIANOULAKIS STEVEN · GIANOULAKIS STEVEN E
10 granted patents·7 pending applications·310 citations·filing 1998–2007
91Inventor score
Top patents by PatentIndex Score
17 records- 0197US6793733B2Gas distribution showerheadAPPLIED MATERIALS INC·Filed 2002·Granted Sep 21, 2004·145 cites·8 claims
- 0296US7452827B2Gas distribution showerhead featuring exhaust aperturesAPPLIED MATERIALS INC·Filed 2006·Granted Nov 18, 2008·41 cites·22 claims
- 0391US7722719B2Gas baffle and distributor for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2005·Granted May 25, 2010·22 cites·29 claims
- 0482US6309461B1Crystal growth and annealing method and apparatusSANDIA CORP·Filed 1999·Granted Oct 30, 2001·49 cites·21 claims
- 0569US6684523B2Particle removal apparatusAPPLIED MATERIALS INC·Filed 2001·Granted Feb 3, 2004·12 cites·14 claims
- 0667US6825448B2Low residual-stress brazed terminal for heaterAPPLIED MATERIALS INC·Filed 2003·Granted Nov 30, 2004·11 cites·20 claims
- 0763US6395455B2Low thermal distortion Extreme-UV lithography reticle and methodEUV LLC·Filed 2001·Granted May 28, 2002·6 cites·25 claims
- 0858US6350310B1Crystal growth and annealing for minimized residual stressSANDIA CORP·Filed 1999·Granted Feb 26, 2002·13 cites·4 claims
- 0951US6441885B2Low thermal distortion extreme-UV lithography reticleEUV LLC·Filed 2001·Granted Aug 27, 2002·2 cites·25 claims
- 1051US2008000530A1Gas flow control by differential pressure measurementsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1148US2005103265A1Gas distribution showerhead featuring exhaust aperturesAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 1245US2005218115A1Anti-clogging nozzle for semiconductor processingAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1343US2004060514A1Gas distribution showerheadAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 1440US6316150B1Low thermal distortion extreme-UV lithography reticleEUV LLC·Filed 1998·Granted Nov 13, 2001·9 cites·25 claims
- 1537US2002011202A1Crystal growth and annealing method and apparatusFiled 2001·Application pending·0 cites
- 1636US2003039087A1Substrate support apparatus to facilitate particle removalAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 1735US2004011780A1Method for achieving a desired process uniformity by modifying surface topography of substrate heaterAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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