Inventor · disambiguated record
Xian-Can Deng
Also filed as: DENG XIAN-CAN
2 granted patents·312 citations·filing 1997–1999
72Inventor score
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0192US5866483AMethod for anisotropically etching tungsten using SF6, CHF3, and N2APPLIED MATERIALS INC·Filed 1997·Granted Feb 2, 1999·254 cites·22 claims
- 0277US6153530APost-etch treatment of plasma-etched feature surfaces to prevent corrosionAPPLIED MATERIALS INC·Filed 1999·Granted Nov 28, 2000·58 cites·30 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →