Inventor · disambiguated record
Manuel J. Herrera
Also filed as: HERRERA MANUEL · HERRERA MANUEL J
13 granted patents·1 pending application·769 citations·filing 1993–2019
95Inventor score
Top patents by PatentIndex Score
14 records- 0198US5433835ASputtering device and target with cover to hold cooling fluidAPPLIED MATERIALS INC·Filed 1993·Granted Jul 18, 1995·115 cites·26 claims
- 0296US5603816ASputtering device and target with cover to hold cooling fluidAPPLIED MATERIALS INC·Filed 1995·Granted Feb 18, 1997·91 cites·2 claims
- 0396US5565071AIntegrated sputtering target assemblyAPPLIED MATERIALS INC·Filed 1995·Granted Oct 15, 1996·126 cites·11 claims
- 0496US5487822AIntegrated sputtering target assemblyAPPLIED MATERIALS INC·Filed 1994·Granted Jan 30, 1996·106 cites·9 claims
- 0593US6494999B1Magnetron sputtering apparatus with an integral cooling and pressure relieving cathodeHONEYWELL INT INC·Filed 2000·Granted Dec 17, 2002·64 cites·31 claims
- 0691US6199259B1Autoclave bonding of sputtering target assemblyAPPLIED KOMATSU TECHNOLOGY INC·Filed 1995·Granted Mar 13, 2001·76 cites·32 claims
- 0790US5676803ASputtering deviceFiled 1997·Granted Oct 14, 1997·46 cites·12 claims
- 0889US5595337ASputtering device and target with cover to hold cooling fluidAPPLIED MATERIALS INC·Filed 1995·Granted Jan 21, 1997·44 cites·3 claims
- 0988US5799860APreparation and bonding of workpieces to form sputtering targets and other assembliesAPPLIED MATERIALS INC·Filed 1995·Granted Sep 1, 1998·56 cites·16 claims
- 1080US6402912B1Sputtering target assemblyHONEYWELL INT INC·Filed 2000·Granted Jun 11, 2002·16 cites·19 claims
- 1176US6436509B1Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatusAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·10 cites·37 claims
- 1267US6033483AElectrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Mar 7, 2000·16 cites·10 claims
- 1360US6821562B2Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatusAPPLIED MATERIALS INC·Filed 2002·Granted Nov 23, 2004·3 cites·20 claims
- 1446US2020148512A1Car mover systems and methodHERRERA MANUEL·Filed 2019·Application pending·0 cites
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