Inventor · disambiguated record
Shinji Wakabayashi
Also filed as: WAKABAYASHI SHINJI
36 granted patents·8 pending applications·306 citations·filing 1983–2022
97Inventor score
Top patents by PatentIndex Score
44 records- 0196US9443749B2Vacuum processing apparatusWAKABAYASHI SHINJI·Filed 2012·Granted Sep 13, 2016·142 cites·17 claims
- 0291US11688619B2Vacuum processing apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 27, 2023·6 cites·19 claims
- 0390US10431481B2Load lock apparatus and substrate processing systemTOKYO ELECTRON LTD·Filed 2016·Granted Oct 1, 2019·6 cites·10 claims
- 0487US8025475B2Wafer transfer apparatus, wafer transfer method and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Sep 27, 2011·12 cites·11 claims
- 0587US7221157B2Magnetic sensor apparatus and manufacturing method thereofDENSO CORP·Filed 2005·Granted May 22, 2007·17 cites·19 claims
- 0686US8123456B2Container changing system and container changing methodWAKABAYASHI SHINJI·Filed 2008·Granted Feb 28, 2012·11 cites·10 claims
- 0780US11404299B2Substrate transfer mechanism, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 2, 2022·2 cites·16 claims
- 0878US10229847B2Substrate transfer chamber and container connecting mechanism with lid opening mechanismsTOKYO ELECTRON LTD·Filed 2017·Granted Mar 12, 2019·2 cites·5 claims
- 0976US9887115B2Substrate processing apparatus, cover opening and closing mechanism,shielding mechanism, and method for purging containerTOKYO ELECTRON LTD·Filed 2013·Granted Feb 6, 2018·3 cites·21 claims
- 1075US9732881B2Gate valve and substrate processing systemTOKYO ELECTRON LTD·Filed 2015·Granted Aug 15, 2017·2 cites·7 claims
- 1172US10906756B2Substrate processing deviceTOKYO ELECTRON LTD·Filed 2019·Granted Feb 2, 2021·1 cites·12 claims
- 1270US9929030B2Substrate processing device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2013·Granted Mar 27, 2018·2 cites·17 claims
- 1367US9330950B2Substrate processing apparatusWAKABAYASHI SHINJI·Filed 2010·Granted May 3, 2016·2 cites·5 claims
- 1466US8021513B2Substrate carrying apparatus and substrate carrying methodTOKYO ELECTRON LTD·Filed 2007·Granted Sep 20, 2011·2 cites·6 claims
- 1566US7487266B2Communication system and method, and distributed control system and methodDENSO CORP·Filed 2006·Granted Feb 3, 2009·5 cites·23 claims
- 1666US7307935B2Recording and playback apparatus, music-data recording and playback method, and music-data recording and playback programALPINE ELECTRONICS INC·Filed 2004·Granted Dec 11, 2007·7 cites·13 claims
- 1766US7113456B2Method and apparatus for playing back a multisession discALPINE ELECTRONICS INC·Filed 2003·Granted Sep 26, 2006·6 cites·12 claims
- 1865US8999103B2Substrate processing system, substrate processing method and storage mediumWAKABAYASHI SHINJI·Filed 2007·Granted Apr 7, 2015·2 cites·6 claims
- 1965US7038459B2Oil deterioration detection apparatusDENSO CORP·Filed 2003·Granted May 2, 2006·5 cites·20 claims
- 2064US4523633AHeater unit for automotive vehicles, permitting easy removal and fitting of heater core from and into casingDIESEL KIKI CO·Filed 1983·Granted Jun 18, 1985·18 cites·3 claims
- 2162US8472778B2Video player and video playback control methodKIMURA MASARU·Filed 2008·Granted Jun 25, 2013·1 cites·17 claims
- 2262US8230728B2Alcohol concentration sensor disposed in fuel tank of automotive vehicleWAKABAYASHI SHINJI·Filed 2008·Granted Jul 31, 2012·1 cites·23 claims
- 2360US6686992B2Raindrop detecting method and apparatus having temperature-dependent characteristic compensationDENSO CORP·Filed 2001·Granted Feb 3, 2004·7 cites·31 claims
- 2460US4908572ARotational speed sensor with unfixed and/or fixed edge speed calculation modesTOYOTA MOTOR CO LTD·Filed 1988·Granted Mar 13, 1990·14 cites·6 claims
- 2558US11335586B2Transfer deviceTOKYO ELECTRON LTD·Filed 2021·Granted May 17, 2022·0 cites·16 claims
- 2657US7720988B2Method and apparatus for multimedia reproductionALPINE ELECTRONICS INC·Filed 2003·Granted May 18, 2010·6 cites·14 claims
- 2754US4834170AAir conditioner for automobilesDIESEL KIKI CO·Filed 1987·Granted May 30, 1989·14 cites·5 claims
- 2854US2015098788A1Substrate transfer chamber and container connecting mechanismTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 2951US12461212B2Substrate processing system and method of estimating height of annular memberTOKYO ELECTRON LTD·Filed 2022·Granted Nov 4, 2025·0 cites·11 claims
- 3050US9389607B2Method for setting substrate-treatment time, and storage mediumWAKABAYASHI SHINJI·Filed 2012·Granted Jul 12, 2016·0 cites·7 claims
- 3148US2009116938A1Check valve and substrate processing apparatus using sameTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 3248US2009060691A1Substrate receiving apparatus and substrate receiving methodTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 3348US2009060692A1Substrate positional misalignment detection systemTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 3447US8214150B2In-vehicle apparatus for performing route guidance or content playback in cooperation with a portable terminalKOHNO SHIGERU·Filed 2008·Granted Jul 3, 2012·2 cites·4 claims
- 3546US2015098790A1Substrate transfer methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 3645US9096395B2Electric actuatorWAKABAYASHI SHINJI·Filed 2012·Granted Aug 4, 2015·0 cites·7 claims
- 3743US2006222478A1Processing apparatus, and system and program for monitoring and controlling fan filter unitTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 3843US2006215347A1Processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 3941US9269599B2Substrate relay apparatus, substrate relay method, and substrate processing apparatusWAKABAYASHI SHINJI·Filed 2012·Granted Feb 23, 2016·0 cites·9 claims
- 4040US4892135AAir conditioner for automobiles with hot/refrigeration compartment for stored articlesDIESEL KIKI CO·Filed 1988·Granted Jan 9, 1990·8 cites·5 claims
- 4139US10403529B2Carrier transport device and carrier transport methodTOKYO ELECTRON LTD·Filed 2015·Granted Sep 3, 2019·0 cites·6 claims
- 4236US10429543B2Substrate detection apparatus, substrate detection method and substrate processing systemTOKYO ELECTRON LTD·Filed 2016·Granted Oct 1, 2019·0 cites·16 claims
- 4336US9962840B2Substrate conveyance apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 8, 2018·0 cites·13 claims
- 4434US2015221537A1Container interchanging methodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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