Inventor · disambiguated record
Frank B. M. Van Bilsen
Also filed as: VAN BILSEN FRANK · VAN BILSEN FRANK B M
9 granted patents·1,440 citations·filing 1997–2007
93Inventor score
Technology areasH10P
Files withASM INC9
Top patents by PatentIndex Score
9 records- 0198US6191399B1System of controlling the temperature of a processing chamberASM INC·Filed 2000·Granted Feb 20, 2001·527 cites·14 claims
- 0296US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 0396US6325858B1Long life high temperature process chamberASM INC·Filed 1998·Granted Dec 4, 2001·596 cites·18 claims
- 0492US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 0592US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 0691US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 0786US6507007B2System of controlling the temperature of a processing chamberASM INC·Filed 2000·Granted Jan 14, 2003·29 cites·30 claims
- 0884US6703592B2System of controlling the temperature of a processing chamberASM INC·Filed 2002·Granted Mar 9, 2004·24 cites·31 claims
- 0980US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →