Inventor · disambiguated record
John F. Wengert
Also filed as: WENGERT JOHN F
13 granted patents·2,930 citations·filing 1996–2007
95Inventor score
Technology areasH10P
Files withASM INC13
Top patents by PatentIndex Score
13 records- 0199US6692576B2Wafer support systemASM INC·Filed 2002·Granted Feb 17, 2004·552 cites·11 claims
- 0299US6093252AProcess chamber with inner supportASM INC·Filed 1996·Granted Jul 25, 2000·638 cites·49 claims
- 0399US6053982AWafer support systemASM INC·Filed 1996·Granted Apr 25, 2000·690 cites·30 claims
- 0496US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 0596US6325858B1Long life high temperature process chamberASM INC·Filed 1998·Granted Dec 4, 2001·596 cites·18 claims
- 0695US6203622B1Wafer support systemASM INC·Filed 2000·Granted Mar 20, 2001·85 cites·34 claims
- 0792US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 0892US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 0991US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 1087US6086680ALow-mass susceptorASM INC·Filed 1996·Granted Jul 11, 2000·88 cites·15 claims
- 1180US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
- 1276US6464792B1Process chamber with downstream getter plateASM INC·Filed 2000·Granted Oct 15, 2002·15 cites·8 claims
- 1354US7186298B2Wafer support systemASM INC·Filed 2003·Granted Mar 6, 2007·2 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →