Inventor · disambiguated record
Robert Vyne
Also filed as: VYNE ROBERT · VYNE ROBERT M · VYNE ROBERT MICHAEL
20 granted patents·3 pending applications·4,149 citations·filing 1996–2025
97Inventor score
Top patents by PatentIndex Score
23 records- 0199USD743357SSusceptorASM IP HOLDING BV·Filed 2013·Granted Nov 17, 2015·490 cites·1 claims
- 0299US6692576B2Wafer support systemASM INC·Filed 2002·Granted Feb 17, 2004·552 cites·11 claims
- 0399US6093252AProcess chamber with inner supportASM INC·Filed 1996·Granted Jul 25, 2000·638 cites·49 claims
- 0499US6053982AWafer support systemASM INC·Filed 1996·Granted Apr 25, 2000·690 cites·30 claims
- 0598US9514927B2Plasma pre-clean module and processASM IP HOLDING BV·Filed 2016·Granted Dec 6, 2016·467 cites·22 claims
- 0698US9299557B2Plasma pre-clean module and processASM IP HOLDING BV·Filed 2014·Granted Mar 29, 2016·472 cites·39 claims
- 0798US6126744AMethod and system for adjusting semiconductor processing equipmentASM INC·Filed 1997·Granted Oct 3, 2000·423 cites·24 claims
- 0896US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 0995US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 1095US6203622B1Wafer support systemASM INC·Filed 2000·Granted Mar 20, 2001·85 cites·34 claims
- 1192US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 1292US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 1391US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 1489US11901179B2Method and device for depositing silicon onto substratesASM IP HOLDING BV·Filed 2021·Granted Feb 13, 2024·1 cites·19 claims
- 1586US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 1685US10446393B2Methods for forming silicon-containing epitaxial layers and related semiconductor device structuresASM IP HOLDING BV·Filed 2018·Granted Oct 15, 2019·4 cites·20 claims
- 1780US10501866B2Gas distribution apparatus for improved film uniformity in an epitaxial systemASM IP HOLDING BV·Filed 2017·Granted Dec 10, 2019·2 cites·18 claims
- 1880US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
- 1979US12315722B2Method for making a radio frequency silicon-on-insulator (RFSOI) wafer including a superlatticeATOMERA INC·Filed 2024·Granted May 27, 2025·0 cites·19 claims
- 2075US2025259840A1Method for making a radio frequency silicon-on-insulator (rfsoi) wafer including a superlatticeATOMERA INC·Filed 2025·Application pending·0 cites
- 2173US2024079231A1Method and device for depositing silicon onto substratesASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2254US7186298B2Wafer support systemASM INC·Filed 2003·Granted Mar 6, 2007·2 cites·8 claims
- 2347US2009280248A1Porous substrate holder with thinned portionsASM INC·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →