Inventor · disambiguated record
Derrick W. Foster
Also filed as: FOSTER DERRICK · FOSTER DERRICK W
18 granted patents·1 pending application·2,511 citations·filing 1984–2007
96Inventor score
Top patents by PatentIndex Score
19 records- 0199US6692576B2Wafer support systemASM INC·Filed 2002·Granted Feb 17, 2004·552 cites·11 claims
- 0299US6093252AProcess chamber with inner supportASM INC·Filed 1996·Granted Jul 25, 2000·638 cites·49 claims
- 0399US6053982AWafer support systemASM INC·Filed 1996·Granted Apr 25, 2000·690 cites·30 claims
- 0496US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 0595US6203622B1Wafer support systemASM INC·Filed 2000·Granted Mar 20, 2001·85 cites·34 claims
- 0694US4720395ALow temperature silicon nitride CVD processANICON INC·Filed 1986·Granted Jan 19, 1988·102 cites·19 claims
- 0792US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 0892US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 0991US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 1089US6608287B2Process chamber with rectangular temperature compensation ringASM INC·Filed 2002·Granted Aug 19, 2003·34 cites·15 claims
- 1187US6086680ALow-mass susceptorASM INC·Filed 1996·Granted Jul 11, 2000·88 cites·15 claims
- 1280US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
- 1377US6749687B1In situ growth of oxide and silicon layersASM INC·Filed 1999·Granted Jun 15, 2004·35 cites·15 claims
- 1469US7112538B2In situ growth of oxide and silicon layersASM INC·Filed 2002·Granted Sep 26, 2006·8 cites·15 claims
- 1565US7105055B2In situ growth of oxide and silicon layersASM INC·Filed 2004·Granted Sep 12, 2006·6 cites·40 claims
- 1654US7186298B2Wafer support systemASM INC·Filed 2003·Granted Mar 6, 2007·2 cites·8 claims
- 1745US8317921B2In situ growth of oxide and silicon layersFERRO ARMAND·Filed 2005·Granted Nov 27, 2012·0 cites·24 claims
- 1842US2010117203A1Oxide-containing film formed from siliconAVIZA TECH INC·Filed 2007·Application pending·0 cites
- 1939US4548159AChemical vapor deposition wafer boatANICON INC·Filed 1984·Granted Oct 22, 1985·7 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →