Inventor · disambiguated record
Michael Halpin
Also filed as: HALPIN MICHAEL · HALPIN MICHAEL W
41 granted patents·2 pending applications·5,770 citations·filing 1988–2018
99Inventor score
Top patents by PatentIndex Score
43 records- 0199US6692576B2Wafer support systemASM INC·Filed 2002·Granted Feb 17, 2004·552 cites·11 claims
- 0299US6143079ACompact process chamber for improved process uniformityASM INC·Filed 1998·Granted Nov 7, 2000·457 cites·58 claims
- 0399US6093252AProcess chamber with inner supportASM INC·Filed 1996·Granted Jul 25, 2000·638 cites·49 claims
- 0499US6053982AWafer support systemASM INC·Filed 1996·Granted Apr 25, 2000·690 cites·30 claims
- 0598US9299595B2Susceptor heater and method of heating a substrateASM IP HOLDING BV·Filed 2014·Granted Mar 29, 2016·506 cites·22 claims
- 0698US9202727B2Susceptor heater shimDUNN TODD·Filed 2012·Granted Dec 1, 2015·524 cites·22 claims
- 0798US9005539B2Chamber sealing memberASM IP HOLDING BV·Filed 2012·Granted Apr 14, 2015·547 cites·23 claims
- 0898US8933375B2Susceptor heater and method of heating a substrateDUNN TODD·Filed 2012·Granted Jan 13, 2015·517 cites·26 claims
- 0997US9340874B2Chamber sealing memberASM IP HOLDING BV·Filed 2015·Granted May 17, 2016·19 cites·23 claims
- 1096USD698904SVacuum flange ringMILLIGAN ROBERT BRENNAN·Filed 2012·Granted Feb 4, 2014·476 cites·1 claims
- 1196US6343183B1Wafer support systemASM INC·Filed 2000·Granted Jan 29, 2002·87 cites·6 claims
- 1295US6203622B1Wafer support systemASM INC·Filed 2000·Granted Mar 20, 2001·85 cites·34 claims
- 1392US6491757B2Wafer support systemASM INC·Filed 2001·Granted Dec 10, 2002·42 cites·24 claims
- 1492US6113702AWafer support systemASM INC·Filed 1997·Granted Sep 5, 2000·93 cites·29 claims
- 1591US6454866B1Wafer support systemASM INC·Filed 2000·Granted Sep 24, 2002·38 cites·9 claims
- 1690US6454863B1Compact process chamber for improved process uniformityASM INC·Filed 2000·Granted Sep 24, 2002·40 cites·9 claims
- 1789US6608287B2Process chamber with rectangular temperature compensation ringASM INC·Filed 2002·Granted Aug 19, 2003·34 cites·15 claims
- 1888US6465761B2Heat lamps for zone heatingASM INC·Filed 2001·Granted Oct 15, 2002·34 cites·44 claims
- 1987US11088015B2Apparatus for adjusting a pedestal assembly for a reactorASM IP HOLDING BV·Filed 2018·Granted Aug 10, 2021·3 cites·15 claims
- 2087US6293749B1Substrate transfer system for semiconductor processing equipmentASM INC·Filed 1998·Granted Sep 25, 2001·95 cites·44 claims
- 2185US10683571B2Gas supply manifold and method of supplying gases to chamber using sameASM IP HOLDING BV·Filed 2014·Granted Jun 16, 2020·8 cites·20 claims
- 2285US7166165B2Barrier coating for vitreous materialsASM INC·Filed 2001·Granted Jan 23, 2007·21 cites·25 claims
- 2385US6021152AReflective surface for CVD reactor wallsASM INC·Filed 1998·Granted Feb 1, 2000·59 cites·25 claims
- 2484US6869485B2Compact process chamber for improved process uniformityASM INC·Filed 2002·Granted Mar 22, 2005·22 cites·13 claims
- 2582US9167625B2Radiation shielding for a substrate holderASM IP HOLDING BV·Filed 2012·Granted Oct 20, 2015·5 cites·25 claims
- 2681US9885123B2Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flowHALPIN MICHAEL W·Filed 2011·Granted Feb 6, 2018·3 cites·13 claims
- 2780US7655093B2Wafer support systemASM INC·Filed 2007·Granted Feb 2, 2010·4 cites·17 claims
- 2880US7169234B2Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holderASM INC·Filed 2004·Granted Jan 30, 2007·27 cites·23 claims
- 2979US6572924B1Exhaust system for vapor deposition reactor and method of using the sameASM INC·Filed 1999·Granted Jun 3, 2003·36 cites·11 claims
- 3069US10480095B2System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flowASM INC·Filed 2018·Granted Nov 19, 2019·0 cites·16 claims
- 3167US6319556B1Reflective surface for CVD reactor wallsASM INC·Filed 1999·Granted Nov 20, 2001·26 cites·20 claims
- 3265US6976586B2Delicate product packaging systemASM INC·Filed 2002·Granted Dec 20, 2005·9 cites·6 claims
- 3364US6856078B2Lamp filament designASM INC·Filed 2002·Granted Feb 15, 2005·7 cites·31 claims
- 3463US6360148B1Method and apparatus for controlling hydraulic dampersFiled 1999·Granted Mar 19, 2002·28 cites·5 claims
- 3560US6980734B2Lamp filament designASM INC·Filed 2004·Granted Dec 27, 2005·5 cites·17 claims
- 3659US6929299B2Bonded structures for use in semiconductor processing environmentsASM INC·Filed 2002·Granted Aug 16, 2005·6 cites·26 claims
- 3758US10186450B2Apparatus and method for adjusting a pedestal assembly for a reactorASM IP HOLDING BV·Filed 2014·Granted Jan 22, 2019·0 cites·14 claims
- 3858US5111682AApparatus and method for determining the flow characteristics of a volumetric flowmeterFLOW TECH·Filed 1989·Granted May 12, 1992·17 cites·1 claims
- 3955US6781291B2Filament support for lampASM INC·Filed 2002·Granted Aug 24, 2004·4 cites·26 claims
- 4054US7186298B2Wafer support systemASM INC·Filed 2003·Granted Mar 6, 2007·2 cites·8 claims
- 4151US2007119377A1Barrier coating for vitreous materialsHALPIN MICHAEL W·Filed 2006·Application pending·0 cites
- 4248US2007056150A1Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holderASM INC·Filed 2006·Application pending·0 cites
- 4334US4854154AApparatus and method for determining the flow characteristics of a volumetric flowmeterFLOW TECH·Filed 1988·Granted Aug 8, 1989·4 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →