Inventor · disambiguated record
Alan C. Janos
Also filed as: JANOS ALAN · JANOS ALAN C
14 granted patents·200 citations·filing 1985–2005
93Inventor score
Top patents by PatentIndex Score
14 records- 0193US6664737B1Dielectric barrier discharge apparatus and process for treating a substrateAXCELIS TECH INC·Filed 2002·Granted Dec 16, 2003·51 cites·21 claims
- 0286US7709814B2Apparatus and process for treating dielectric materialsAXCELIS TECH INC·Filed 2005·Granted May 4, 2010·12 cites·47 claims
- 0380US7166963B2Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiationAXCELIS TECH INC·Filed 2004·Granted Jan 23, 2007·26 cites·22 claims
- 0475US6597003B2Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafersAXCELIS TECH INC·Filed 2001·Granted Jul 22, 2003·20 cites·29 claims
- 0573US6585908B2Shallow angle interference process and apparatus for determining real-time etching rateAXCELIS TECH INC·Filed 2001·Granted Jul 1, 2003·17 cites·33 claims
- 0665US6605484B2Process for optically erasing charge buildup during fabrication of an integrated circuitAXCELIS TECH INC·Filed 2001·Granted Aug 12, 2003·9 cites·21 claims
- 0764US7821655B2In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint predictionAXCELIS TECH INC·Filed 2005·Granted Oct 26, 2010·4 cites·12 claims
- 0858US4713208ASpheromak reactor with poloidal flux-amplifying transformerUS ENERGY·Filed 1986·Granted Dec 15, 1987·18 cites·3 claims
- 0952US5980638ADouble window exhaust arrangement for wafer plasma processorFUSION SYSTEMS CORP·Filed 1997·Granted Nov 9, 1999·17 cites·14 claims
- 1050US6547458B1Optimized optical system design for endpoint detectionAXCELIS TECH INC·Filed 1999·Granted Apr 15, 2003·16 cites·31 claims
- 1147US6897615B2Plasma process and apparatusAXCELIS TECH INC·Filed 2001·Granted May 24, 2005·4 cites·37 claims
- 1242US6987269B2Apparatus and process for measuring light intensitiesAXCELIS TECH INC·Filed 2002·Granted Jan 17, 2006·3 cites·7 claims
- 1340US6803319B2Process for optically erasing charge buildup during fabrication of an integrated circuitAXCELIS TECH INC·Filed 2003·Granted Oct 12, 2004·0 cites·17 claims
- 1430US4687617ASteady-state inductive spheromak operationUS ENERGY·Filed 1985·Granted Aug 18, 1987·3 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →