Inventor · disambiguated record
Keith Comendant
Also filed as: COMENDANT KEITH · COMENDANT KEITH LAURENCE
48 granted patents·7 pending applications·1,138 citations·filing 2002–2025
98Inventor score
Top patents by PatentIndex Score
55 records- 0199US7651269B2Temperature probes having a thermally isolated tipLAM RES CORP·Filed 2007·Granted Jan 26, 2010·498 cites·20 claims
- 0298US8884194B2Heating plate with planar heater zones for semiconductor processingLAM RES CORP·Filed 2013·Granted Nov 11, 2014·52 cites·20 claims
- 0398US8637794B2Heating plate with planar heating zones for semiconductor processingSINGH HARMEET·Filed 2009·Granted Jan 28, 2014·86 cites·15 claims
- 0497US10056225B2Adjusting substrate temperature to improve CD uniformityLAM RES CORP·Filed 2013·Granted Aug 21, 2018·36 cites·11 claims
- 0597US8624168B2Heating plate with diode planar heater zones for semiconductor processingGAFF KEITH WILLIAM·Filed 2011·Granted Jan 7, 2014·57 cites·17 claims
- 0697US8587113B2Thermal plate with planar thermal zones for semiconductor processingLAM RES CORP·Filed 2013·Granted Nov 19, 2013·40 cites·18 claims
- 0797US8461674B2Thermal plate with planar thermal zones for semiconductor processingGAFF KEITH WILLIAM·Filed 2011·Granted Jun 11, 2013·63 cites·18 claims
- 0896US7854820B2Upper electrode backing member with particle reducing featuresLAM RES CORP·Filed 2006·Granted Dec 21, 2010·38 cites·7 claims
- 0995US9392643B2Heating plate with planar heater zones for semiconductor processingLAM RES CORP·Filed 2013·Granted Jul 12, 2016·12 cites·21 claims
- 1095US8642480B2Adjusting substrate temperature to improve CD uniformityGAFF KEITH WILLIAM·Filed 2010·Granted Feb 4, 2014·22 cites·16 claims
- 1194US10236193B2Substrate supports with multi-layer structure including independent operated heater zonesLAM RES CORP·Filed 2017·Granted Mar 19, 2019·6 cites·20 claims
- 1293US7431788B2Method of protecting a bond layer in a substrate support adapted for use in a plasma processing systemLAM RES CORP·Filed 2005·Granted Oct 7, 2008·36 cites·29 claims
- 1393US7223321B1Faraday shield disposed within an inductively coupled plasma etching apparatusLAM RES CORP·Filed 2002·Granted May 29, 2007·40 cites·28 claims
- 1492US10720346B2Substrate support with thermal zones for semiconductor processingLAM RES CORP·Filed 2016·Granted Jul 21, 2020·5 cites·25 claims
- 1592US10049948B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2012·Granted Aug 14, 2018·14 cites·19 claims
- 1692US9646861B2Heating plate with heating zones for substrate processing and method of use thereofLAM RES CORP·Filed 2013·Granted May 9, 2017·7 cites·25 claims
- 1791US7875824B2Quartz guard ring centering featuresLAM RES CORP·Filed 2007·Granted Jan 25, 2011·16 cites·21 claims
- 1889US7501605B2Method of tuning thermal conductivity of electrostatic chuck support assemblyLAM RES CORP·Filed 2006·Granted Mar 10, 2009·12 cites·18 claims
- 1986US8702866B2Showerhead electrode assembly with gas flow modification for extended electrode lifeAUGUSTINO JASON·Filed 2006·Granted Apr 22, 2014·10 cites·19 claims
- 2086US7939784B2Electrostatic chuck support assemblyLAM RES CORP·Filed 2009·Granted May 10, 2011·8 cites·19 claims
- 2185US8735298B2Method for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2012·Granted May 27, 2014·4 cites·21 claims
- 2285US8084705B2Quartz guard ring centering featuresLARSON DEAN J·Filed 2010·Granted Dec 27, 2011·6 cites·12 claims
- 2385US8038796B2Apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2004·Granted Oct 18, 2011·21 cites·19 claims
- 2484US12237201B2Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patternsLAM RES CORP·Filed 2024·Granted Feb 25, 2025·0 cites·22 claims
- 2581US11942351B2Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patternsLAM RES CORP·Filed 2023·Granted Mar 26, 2024·0 cites·20 claims
- 2681US8051556B2Method of manufacturing apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2008·Granted Nov 8, 2011·4 cites·20 claims
- 2778US10002782B2ESC assembly including an electrically conductive gasket for uniform RF power delivery therethroughLAM RES CORP·Filed 2014·Granted Jun 19, 2018·3 cites·35 claims
- 2878US8519724B2Electrode for use in measuring dielectric properties of partsKIM JAEHYUN·Filed 2008·Granted Aug 27, 2013·7 cites·19 claims
- 2977US9608550B2Lightup prevention using multi-layer ceramic fabrication techniquesLAM RES CORP·Filed 2015·Granted Mar 28, 2017·2 cites·18 claims
- 3077US7973539B1Methods for measuring dielectric properties of partsLAM RES CORP·Filed 2011·Granted Jul 5, 2011·3 cites·17 claims
- 3176US2025316459A1Electrostatic edge ring mounting system for substrate processingLAM RES CORP·Filed 2025·Application pending·0 cites
- 3275US8503151B2Plasma arrestor insertCOMENDANT KEITH·Filed 2009·Granted Aug 6, 2013·6 cites·9 claims
- 3375US7998296B2Method of protecting a bond layer in a substrate support adapted for use in a plasma processing systemLAM RES CORP·Filed 2008·Granted Aug 16, 2011·6 cites·17 claims
- 3473US11302556B2Apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2020·Granted Apr 12, 2022·0 cites·19 claims
- 3573US10770363B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2018·Granted Sep 8, 2020·1 cites·20 claims
- 3672US8821639B2Apparatus for spatial and temporal control of temperature on a substrateRICCI ANTHONY J·Filed 2011·Granted Sep 2, 2014·2 cites·7 claims
- 3771US8709202B2Upper electrode backing member with particle reducing featuresDE LA LLERA ANTHONY·Filed 2010·Granted Apr 29, 2014·2 cites·11 claims
- 3871US2024404798A1High power electrostatic chuck with features preventing he hole light-up/arcingLAM RES CORP·Filed 2024·Application pending·0 cites
- 3965US12340989B2Electrostatic edge ring mounting system for substrate processingLAM RES CORP·Filed 2021·Granted Jun 24, 2025·0 cites·25 claims
- 4063US8540843B2Plasma chamber top piece assemblySHARPLESS LEONARD J·Filed 2010·Granted Sep 24, 2013·1 cites·20 claims
- 4163US7780791B2Apparatus for an optimized plasma chamber top pieceLAM RES CORP·Filed 2004·Granted Aug 24, 2010·8 cites·16 claims
- 4262US9322795B2Electrode for use in measuring dielectric properties of partsLAM RES CORP·Filed 2013·Granted Apr 26, 2016·0 cites·16 claims
- 4362US8269510B2Apparatus for measuring dielectric properties of partsKIM JAEHYUN·Filed 2008·Granted Sep 18, 2012·2 cites·20 claims
- 4461US11664262B2Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patternsLAM RES CORP·Filed 2018·Granted May 30, 2023·0 cites·18 claims
- 4561US7777500B2Methods for characterizing dielectric properties of partsLAM RES CORP·Filed 2008·Granted Aug 17, 2010·2 cites·10 claims
- 4660US10636689B2Apparatus for spatial and temporal control of temperature on a substrateLAM RES CORP·Filed 2014·Granted Apr 28, 2020·0 cites·18 claims
- 4758US10804129B2Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrodeLAM RES CORP·Filed 2018·Granted Oct 13, 2020·0 cites·24 claims
- 4857US2007181257A1Faraday Shield Disposed Within An Inductively Coupled Plasma Etching apparatusLAM RES CORP·Filed 2007·Application pending·0 cites
- 4953US9093483B2Showerhead electrode assembly with gas flow modification for extended electrode lifeLAM RES CORP·Filed 2014·Granted Jul 28, 2015·0 cites·17 claims
- 5052US9318349B2Plasma chamber top piece assemblySHARPLESS LEONARD J·Filed 2013·Granted Apr 19, 2016·0 cites·17 claims
Showing the top 50 of 55 patent records by PatentIndex Score.
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