Inventor · disambiguated record
Alex Minkovich
Also filed as: MINKOVICH ALEX
7 granted patents·2 pending applications·33 citations·filing 2006–2023
82Inventor score
Top patents by PatentIndex Score
9 records- 0188US9538583B2Substrate support with switchable multizone heaterAPPLIED MATERIALS INC·Filed 2013·Granted Jan 3, 2017·9 cites·18 claims
- 0285US8880210B2Methods and apparatus for processing substrates using model-based controlPORTHOUSE KEITH BRIAN·Filed 2011·Granted Nov 4, 2014·9 cites·21 claims
- 0381US11430680B2Position and temperature monitoring of ALD platen susceptorAPPLIED MATERIALS INC·Filed 2019·Granted Aug 30, 2022·2 cites·12 claims
- 0481US10312120B2Position and temperature monitoring of ALD platen susceptorAPPLIED MATERIALS INC·Filed 2014·Granted Jun 4, 2019·4 cites·18 claims
- 0575US10196741B2Wafer placement and gap control optimization through in situ feedbackAPPLIED MATERIALS INC·Filed 2014·Granted Feb 5, 2019·3 cites·17 claims
- 0672US12474388B1Synchronization of RF measurements in networked systemsDIGITAL DYNAMICS INC·Filed 2023·Granted Nov 18, 2025·0 cites·8 claims
- 0770US9296105B2Vibration-controlled substrate handling robots, systems, and methodsAPPLIED MATERIALS INC·Filed 2013·Granted Mar 29, 2016·6 cites·19 claims
- 0840US2007251939A1Control scheme for cold wafer compensation on a lithography trackAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0932US2012196242A1Substrate support with heater and rapid temperature changeVOLFOVSKI LEON·Filed 2011·Application pending·0 cites
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