Inventor · disambiguated record
Michel Pieter Dansberg
Also filed as: DANSBERG MICHEL PIETER
11 granted patents·26 citations·filing 2004–2019
84Inventor score
Files withMAPPER LITHOGRAPHY IP BV4ASML NETHERLANDS BV3DE BOER GUIDO1KRUIT PIETER1LOOIJE ALEXIUS OTTO1
Top patents by PatentIndex Score
11 records- 0188US9665013B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 30, 2017·4 cites·19 claims
- 0280US7359032B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 15, 2008·17 cites·18 claims
- 0371US9645511B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 9, 2017·1 cites·14 claims
- 0471US8705010B2Lithography system, method of clamping and wafer tableDE BOER GUIDO·Filed 2008·Granted Apr 22, 2014·2 cites·30 claims
- 0567US9268216B2Projection system with flexible couplingPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Feb 23, 2016·2 cites·30 claims
- 0654US7679720B2Apparatus configured to position a workpieceASML NETHERLANDS BV·Filed 2008·Granted Mar 16, 2010·0 cites·15 claims
- 0748US8325321B2Lithography system, method of heat dissipation and frameKRUIT PIETER·Filed 2007·Granted Dec 4, 2012·0 cites·17 claims
- 0846USRE49488ELithography system, method of clamping and wafer tableASML NETHERLANDS BV·Filed 2019·Granted Apr 11, 2023·0 cites·24 claims
- 0935US9009631B2Lithography system and method for storing positional data of a targetLOOIJE ALEXIUS OTTO·Filed 2012·Granted Apr 14, 2015·0 cites·27 claims
- 1029US10144134B2Enclosure for a target processing machineMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Dec 4, 2018·0 cites·42 claims
- 1125US10087019B2Load lock system and method for transferring substrates in a lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Oct 2, 2018·0 cites·47 claims
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