Inventor · disambiguated record
Dean Jennings
Also filed as: JENNINGS DEAN · JENNINGS DEAN C
74 granted patents·14 pending applications·5,624 citations·filing 1985–2020
99Inventor score
Top patents by PatentIndex Score
88 records- 0199US7429532B2Semiconductor substrate process using an optically writable carbon-containing maskAPPLIED MATERIALS INC·Filed 2005·Granted Sep 30, 2008·539 cites·18 claims
- 0299US7422775B2Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealingAPPLIED MATERIALS INC·Filed 2005·Granted Sep 9, 2008·535 cites·17 claims
- 0399US7335611B2Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layerAPPLIED MATERIALS INC·Filed 2005·Granted Feb 26, 2008·535 cites·20 claims
- 0499US7323401B2Semiconductor substrate process using a low temperature deposited carbon-containing hard maskAPPLIED MATERIALS INC·Filed 2005·Granted Jan 29, 2008·580 cites·17 claims
- 0599US7312148B2Copper barrier reflow process employing high speed optical annealingAPPLIED MATERIALS INC·Filed 2005·Granted Dec 25, 2007·537 cites·21 claims
- 0699US7312162B2Low temperature plasma deposition process for carbon layer depositionAPPLIED MATERIALS INC·Filed 2005·Granted Dec 25, 2007·544 cites·19 claims
- 0799US7109098B1Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealingAPPLIED MATERIALS INC·Filed 2005·Granted Sep 19, 2006·551 cites·15 claims
- 0898US7279721B2Dual wavelength thermal flux laser annealAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·46 cites·21 claims
- 0997US8148663B2Apparatus and method of improving beam shaping and beam homogenizationADAMS BRUCE E·Filed 2007·Granted Apr 3, 2012·45 cites·14 claims
- 1097US7135392B1Thermal flux laser annealing for ion implantation of semiconductor P-N junctionsAPPLIED MATERIALS INC·Filed 2005·Granted Nov 14, 2006·50 cites·10 claims
- 1197US6987240B2Thermal flux processing by scanningAPPLIED MATERIALS INC·Filed 2002·Granted Jan 17, 2006·183 cites·45 claims
- 1296US8288683B2Fast axis beam profile shaping for high power laser diode based annealing systemJENNINGS DEAN·Filed 2008·Granted Oct 16, 2012·34 cites·24 claims
- 1396US7595208B2Method of laser annealing using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2007·Granted Sep 29, 2009·22 cites·20 claims
- 1496US7005601B2Thermal flux processing by scanningAPPLIED MATERIALS INC·Filed 2002·Granted Feb 28, 2006·97 cites·43 claims
- 1596US6264467B1Micro grooved support surface for reducing substrate wear and slip formationAPPLIED MATERIALS INC·Filed 1999·Granted Jul 24, 2001·547 cites·38 claims
- 1695US8829392B2Apparatus and method of improving beam shaping and beam homogenizationADAMS BRUCE E·Filed 2012·Granted Sep 9, 2014·15 cites·11 claims
- 1794US7494272B2Dynamic surface annealing using addressable laser array with pyrometry feedbackAPPLIED MATERIALS INC·Filed 2006·Granted Feb 24, 2009·26 cites·12 claims
- 1894US7129440B2Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodesAPPLIED MATERIALS INC·Filed 2005·Granted Oct 31, 2006·26 cites·17 claims
- 1992US8829393B2Scanned laser light sourceJENNINGS DEAN C·Filed 2012·Granted Sep 9, 2014·10 cites·8 claims
- 2091US6215106B1Thermally processing a substrateAPPLIED MATERIALS INC·Filed 1999·Granted Apr 10, 2001·87 cites·23 claims
- 2190US9908200B2Apparatus and method of improving beam shaping and beam homogenizationAPPLIED MATERIALS INC·Filed 2014·Granted Mar 6, 2018·6 cites·20 claims
- 2290US8518838B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2012·Granted Aug 27, 2013·10 cites·20 claims
- 2390US7398693B2Adaptive control method for rapid thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Jul 15, 2008·19 cites·33 claims
- 2489US10857623B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2017·Granted Dec 8, 2020·2 cites·20 claims
- 2589US7772134B2Method of annealing using two wavelengths of continuous wave laser radiationAPPLIED MATERIALS INC·Filed 2009·Granted Aug 10, 2010·7 cites·18 claims
- 2689US6803297B2Optimal spike anneal ambientAPPLIED MATERIALS INC·Filed 2002·Granted Oct 12, 2004·49 cites·20 claims
- 2788US8242407B2Annealing apparatus using two wavelengths of continuous wave laser radiationJENNINGS DEAN·Filed 2010·Granted Aug 14, 2012·5 cites·20 claims
- 2888US7872209B2Thermal flux processing by scanning a focused line beamAPPLIED MATERIALS INC·Filed 2007·Granted Jan 18, 2011·8 cites·14 claims
- 2988US7674999B2Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing systemAPPLIED MATERIALS INC·Filed 2006·Granted Mar 9, 2010·11 cites·16 claims
- 3087US9839976B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·3 cites·13 claims
- 3187US7875829B2Thermal flux processing by scanning a focused line beamAPPLIED MATERIALS INC·Filed 2006·Granted Jan 25, 2011·7 cites·24 claims
- 3287US7078651B2Thermal flux deposition by scanningAPPLIED MATERIALS INC·Filed 2002·Granted Jul 18, 2006·32 cites·62 claims
- 3386US7569463B2Method of thermal processing structures formed on a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Aug 4, 2009·9 cites·25 claims
- 3485US8907247B2Annealing apparatus using two wavelengths of laser radiationJENNINGS DEAN·Filed 2012·Granted Dec 9, 2014·3 cites·17 claims
- 3585US7548364B2Ultra-fast beam dithering with surface acoustic wave modulatorAPPLIED MATERIALS INC·Filed 2006·Granted Jun 16, 2009·8 cites·13 claims
- 3684US7795816B2High speed phase scrambling of a coherent beam using plasmaAPPLIED MATERIALS INC·Filed 2007·Granted Sep 14, 2010·8 cites·17 claims
- 3782US8316867B2Electrostatic chuck cleaning during semiconductor substrate processingJENNINGS DEAN C·Filed 2011·Granted Nov 27, 2012·5 cites·17 claims
- 3882US6200388B1Substrate support for a thermal processing chamberAPPLIED MATERIALS INC·Filed 1998·Granted Mar 13, 2001·59 cites·18 claims
- 3981US7993465B2Electrostatic chuck cleaning during semiconductor substrate processingAPPLIED MATERIALS INC·Filed 2006·Granted Aug 9, 2011·6 cites·15 claims
- 4081US7109087B2Absorber layer for DSA processingAPPLIED MATERIALS INC·Filed 2003·Granted Sep 19, 2006·20 cites·23 claims
- 4181US6803546B1Thermally processing a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Oct 12, 2004·25 cites·33 claims
- 4280US8178819B2Thermal flux processing by scanning a focused line beamJENNINGS DEAN C·Filed 2005·Granted May 15, 2012·4 cites·16 claims
- 4380US7041931B2Stepped reflector plateAPPLIED MATERIALS INC·Filed 2002·Granted May 9, 2006·24 cites·32 claims
- 4480US4910160AHigh voltage complementary NPN/PNP processNAT SEMICONDUCTOR CORP·Filed 1989·Granted Mar 20, 1990·58 cites·8 claims
- 4579US6096621APolysilicon filled trench isolation structure for soi integrated circuitsELANTEC INC·Filed 1997·Granted Aug 1, 2000·54 cites·10 claims
- 4679US6037239AMethod for making a contact structure for a polysilicon filled trench isolationELANTEC INC·Filed 1997·Granted Mar 14, 2000·44 cites·27 claims
- 4777US11945045B2Annealing apparatus using two wavelengths of radiationAPPLIED MATERIALS INC·Filed 2020·Granted Apr 2, 2024·0 cites·19 claims
- 4876US7422988B2Rapid detection of imminent failure in laser thermal processing of a substrateAPPLIED MATERIALS INC·Filed 2005·Granted Sep 9, 2008·4 cites·10 claims
- 4974US8363320B2Method and apparatus for decorrelation of spatially and temporally coherent lightAPPLIED MATERIALS INC·Filed 2011·Granted Jan 29, 2013·2 cites·20 claims
- 5072US10141191B2Method of thermal processing structures formed on a substrateCAREY PAUL·Filed 2010·Granted Nov 27, 2018·2 cites·17 claims
Showing the top 50 of 88 patent records by PatentIndex Score.
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