Inventor · disambiguated record
Steven M. Zuniga
Also filed as: ZUNIGA STEVEN · ZUNIGA STEVEN M
177 granted patents·42 pending applications·4,764 citations·filing 1996–2025
99Inventor score
Top patents by PatentIndex Score
219 records- 0198US11260500B2Retaining ring with shaped surfaceAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·4 cites·9 claims
- 0298US7207871B1Carrier head with multiple chambersAPPLIED MATERIALS INC·Filed 2005·Granted Apr 24, 2007·53 cites·21 claims
- 0398US6776692B1Closed-loop control of wafer polishing in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 17, 2004·92 cites·22 claims
- 0498US6251215B1Carrier head with a multilayer retaining ring for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1998·Granted Jun 26, 2001·190 cites·9 claims
- 0598US6183354B1Carrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Feb 6, 2001·276 cites·92 claims
- 0697US7198561B2Flexible membrane for multi-chamber carrier headAPPLIED MATERIALS INC·Filed 2005·Granted Apr 3, 2007·35 cites·16 claims
- 0797US7101273B2Carrier head with gimbal mechanismAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·37 cites·12 claims
- 0897US6857945B1Multi-chamber carrier head with a flexible membraneAPPLIED MATERIALS INC·Filed 2000·Granted Feb 22, 2005·116 cites·27 claims
- 0997US5762544ACarrier head design for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1996·Granted Jun 9, 1998·304 cites·23 claims
- 1096US10766117B2Retaining ring with shaped surfaceAPPLIED MATERIALS INC·Filed 2018·Granted Sep 8, 2020·5 cites·3 claims
- 1196US9368371B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2014·Granted Jun 14, 2016·21 cites·15 claims
- 1296US8066551B2Retaining ring with shaped surfaceCHEN HUNG CHIH·Filed 2011·Granted Nov 29, 2011·14 cites·19 claims
- 1396US8029640B2Multilayer retaining ring for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2009·Granted Oct 4, 2011·16 cites·16 claims
- 1496US7950985B2Flexible membrane for carrier headAPPLIED MATERIALS INC·Filed 2010·Granted May 31, 2011·27 cites·14 claims
- 1596US7575504B2Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assemblyAPPLIED MATERIALS INC·Filed 2007·Granted Aug 18, 2009·41 cites·31 claims
- 1696US6890249B1Carrier head with edge load retaining ringAPPLIED MATERIALS INC·Filed 2002·Granted May 10, 2005·69 cites·28 claims
- 1796US6872130B1Carrier head with non-contact retainerAPPLIED MATERIALS INC·Filed 2002·Granted Mar 29, 2005·68 cites·26 claims
- 1896US6722965B2Carrier head with flexible membranes to provide controllable pressure and loading areaAPPLIED MATERIALS INC·Filed 2001·Granted Apr 20, 2004·66 cites·17 claims
- 1996US6450868B1Carrier head with multi-part flexible membraneAPPLIED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·67 cites·24 claims
- 2096US6361420B1Method of chemical mechanical polishing with edge controlAPPLIED MATERIALS INC·Filed 2000·Granted Mar 26, 2002·55 cites·3 claims
- 2196US6159079ACarrier head for chemical mechanical polishing a substrateAPPLIED MATERIALS INC·Filed 1998·Granted Dec 12, 2000·152 cites·26 claims
- 2296US5957751ACarrier head with a substrate detection mechanism for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Sep 28, 1999·147 cites·38 claims
- 2395US12033865B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2023·Granted Jul 9, 2024·1 cites·15 claims
- 2495US8469776B2Flexible membrane for carrier headZUNIGA STEVEN M·Filed 2011·Granted Jun 25, 2013·20 cites·17 claims
- 2595US8088299B2Multiple zone carrier head with flexible membraneCHEN HUNG CHIH·Filed 2010·Granted Jan 3, 2012·22 cites·13 claims
- 2695US8021215B2Carrier head with retaining ring and carrier ringAPPLIED MATERIALS INC·Filed 2010·Granted Sep 20, 2011·19 cites·18 claims
- 2795US7727055B2Flexible membrane for carrier headAPPLIED MATERIALS INC·Filed 2007·Granted Jun 1, 2010·28 cites·16 claims
- 2895US7699688B2Carrier ring for carrier headAPPLIED MATERIALS INC·Filed 2007·Granted Apr 20, 2010·26 cites·25 claims
- 2995US7654888B2Carrier head with retaining ring and carrier ringAPPLIED MATERIALS INC·Filed 2007·Granted Feb 2, 2010·33 cites·17 claims
- 3095US7527271B2Fast substrate loading on polishing head without membrane inflation stepAPPLIED MATERIALS INC·Filed 2007·Granted May 5, 2009·32 cites·17 claims
- 3195US7459057B2Substrate retainerAPPLIED MATERIALS INC·Filed 2002·Granted Dec 2, 2008·38 cites·3 claims
- 3295US7255771B2Multiple zone carrier head with flexible membraneAPPLIED MATERIALS INC·Filed 2004·Granted Aug 14, 2007·82 cites·25 claims
- 3395US7101272B2Carrier head for thermal drift compensationAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·27 cites·37 claims
- 3495US7001257B2Multi-chamber carrier head with a flexible membraneAPPLIED MATERIALS INC·Filed 2005·Granted Feb 21, 2006·26 cites·15 claims
- 3595US6436828B1Chemical mechanical polishing using magnetic forceAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·60 cites·16 claims
- 3695US6422927B1Carrier head with controllable pressure and loading area for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1999·Granted Jul 23, 2002·109 cites·28 claims
- 3795US6132298ACarrier head with edge control for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1998·Granted Oct 17, 2000·118 cites·32 claims
- 3895US6080050ACarrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Jun 27, 2000·125 cites·29 claims
- 3994US11682561B2Retaining ring having inner surfaces with facetsAPPLIED MATERIALS INC·Filed 2021·Granted Jun 20, 2023·2 cites·19 claims
- 4094US10562147B2Polishing system with annular platen or polishing pad for substrate monitoringAPPLIED MATERIALS INC·Filed 2017·Granted Feb 18, 2020·4 cites·11 claims
- 4194US10500695B2Retaining ring having inner surfaces with featuresAPPLIED MATERIALS INC·Filed 2016·Granted Dec 10, 2019·9 cites·14 claims
- 4294US8585468B2Retaining ring with shaped surfaceCHEN HUNG CHIH·Filed 2011·Granted Nov 19, 2013·8 cites·5 claims
- 4394US7883397B2Substrate retainerAPPLIED MATERIALS INC·Filed 2008·Granted Feb 8, 2011·15 cites·21 claims
- 4494US7344434B2Retaining ring with shaped surfaceAPPLIED MATERIALS INC·Filed 2004·Granted Mar 18, 2008·33 cites·15 claims
- 4594US5993302ACarrier head with a removable retaining ring for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Nov 30, 1999·120 cites·32 claims
- 4693US12048981B2Retaining ring having inner surfaces with featuresAPPLIED MATERIALS INC·Filed 2022·Granted Jul 30, 2024·1 cites·9 claims
- 4793US11325223B2Carrier head with segmented substrate chuckAPPLIED MATERIALS INC·Filed 2019·Granted May 10, 2022·4 cites·21 claims
- 4893US8808062B2Multi-chamber carrier head with a textured membraneAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·8 cites·14 claims
- 4993US6572446B1Chemical mechanical polishing pad conditioning element with discrete points and compliant membraneAPPLIED MATERIALS INC·Filed 2000·Granted Jun 3, 2003·46 cites·42 claims
- 5093US6494774B1Carrier head with pressure transfer mechanismAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·47 cites·24 claims
Showing the top 50 of 219 patent records by PatentIndex Score.
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