Inventor · disambiguated record
Wan Suk Oh
Also filed as: OH WAN SUK
7 granted patents·5 pending applications·52 citations·filing 2010–2022
75Inventor score
Top patents by PatentIndex Score
12 records- 0193US9425057B2Method and apparatus for manufacturing three-dimensional-structure memory deviceCHO SUNG KIL·Filed 2011·Granted Aug 23, 2016·51 cites·8 claims
- 0275US10006121B2Method and apparatus for manufacturing three-dimensional-structure memory deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Jun 26, 2018·1 cites·9 claims
- 0355US2023097999A1Showerhead and substrate processing apparatus including the sameEUGENE TECHNOLOGY CO LTD·Filed 2022·Application pending·0 cites
- 0451US9721798B2Method and apparatus for depositing amorphous silicon filmEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Aug 1, 2017·0 cites·2 claims
- 0546US2017256410A1Method and apparatus for depositing amorphous silicon filmEUGENE TECHNOLOGY CO LTD·Filed 2017·Application pending·0 cites
- 0646US2025029868A1Lift pin protection assembly and substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2022·Application pending·0 cites
- 0742US9741562B2Method for forming polysilicon filmEUGENE TECHNOLOGY CO LTD·Filed 2015·Granted Aug 22, 2017·0 cites·14 claims
- 0841US2022049349A1Method for forming a thin filmEUGENE TECHNOLOGY CO LTD·Filed 2019·Application pending·0 cites
- 0937US10796915B2Method for forming epitaxial layer at low temperatureEUGENE TECHNOLOGY CO LTD·Filed 2017·Granted Oct 6, 2020·0 cites·5 claims
- 1037US10246773B2Method for forming amorphous thin filmEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Apr 2, 2019·0 cites·16 claims
- 1137US9396954B2Method and apparatus for manufacturing three-dimensional-structure memory deviceCHO SUNG KIL·Filed 2011·Granted Jul 19, 2016·0 cites·9 claims
- 1234US2012160419A1Substrate-supporting unit and substrate-processing apparatus comprising sameLEE DONG-KEUN·Filed 2010·Application pending·0 cites
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