Inventor · disambiguated record
Seng-Keong Victor Lim
Also filed as: LIM SENG KEONG · LIM SENG-KEONG VICTOR
7 granted patents·2 pending applications·194 citations·filing 2000–2025
85Inventor score
Top patents by PatentIndex Score
9 records- 0197US7902548B2Planar voltage contrast test structureCHARTERED SEMICONDUCTOR MFG·Filed 2006·Granted Mar 8, 2011·84 cites·10 claims
- 0293US6380106B1Method for fabricating an air gap metallization scheme that reduces inter-metal capacitance of interconnect structuresCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Apr 30, 2002·84 cites·11 claims
- 0382US2025377312A1Substrate defect analysisAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0477US12422378B2Substrate defect analysisAPPLIED MATERIALS INC·Filed 2022·Granted Sep 23, 2025·0 cites·20 claims
- 0568US6613649B2Method for buffer STI scheme with a hard mask layer as an oxidation barrierCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Sep 2, 2003·16 cites·21 claims
- 0651US7160741B2Planar voltage contrast test structure and methodCHARTERED SEMICONDUCTOR MFG·Filed 2003·Granted Jan 9, 2007·4 cites·10 claims
- 0751US6613648B1Shallow trench isolation using TEOS cap and polysilicon pullbackCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Sep 2, 2003·5 cites·15 claims
- 0842US7052372B2Chemical-mechanical polisher hardware designCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted May 30, 2006·1 cites·46 claims
- 0938US2013252350A1System and method for generating care areas for defect inspectionLEE HUN CHOW·Filed 2012·Application pending·0 cites
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