Inventor · disambiguated record
Morgan Evans
Also filed as: EVANS MORGAN · EVANS MORGAN D
88 granted patents·22 pending applications·409 citations·filing 2002–2025
99Inventor score
Files withAPPLIED MATERIALS INC43VARIAN SEMICONDUCTOR EQUIPMENT ASS INC32VARIAN SEMICONDUCTOR EQUIPMENT15AGITATED SOLUTIONS INC12GODET LUDOVIC3
Top patents by PatentIndex Score
110 records- 0198US8815720B2Method of etching a workpieceGODET LUDOVIC·Filed 2012·Granted Aug 26, 2014·102 cites·9 claims
- 0297US11247298B2Method of forming a plurality of gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·9 cites·20 claims
- 0396US11226441B2Methods of producing slanted gratings with variable etch depthsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 18, 2022·4 cites·18 claims
- 0496US10823888B1Methods of producing slanted gratings with variable etch depthsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 3, 2020·15 cites·15 claims
- 0596US10302826B1Controlling etch angles by substrate rotation in angled etch toolsAPPLIED MATERIALS INC·Filed 2018·Granted May 28, 2019·15 cites·20 claims
- 0695US12106936B2Scanned angled etching apparatus and techniques providing separate co-linear radicals and ionsAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·2 cites·20 claims
- 0795US7176470B1Technique for high-efficiency ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Feb 13, 2007·54 cites·15 claims
- 0894US9287148B1Dynamic heating method and system for wafer processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·17 cites·15 claims
- 0993US10935799B2Optical component having depth modulated angled gratings and method of formationAPPLIED MATERIALS INC·Filed 2018·Granted Mar 2, 2021·10 cites·15 claims
- 1091US10775158B2System and method for detecting etch depth of angled surface relief gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 15, 2020·7 cites·16 claims
- 1190US10276340B1Low particle capacitively coupled components for workpiece processingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 30, 2019·6 cites·18 claims
- 1289US11119405B2Techniques for forming angled structuresAPPLIED MATERIALS INC·Filed 2018·Granted Sep 14, 2021·5 cites·15 claims
- 1389US10607847B1Gate all around device and method of formation using angled ionsAPPLIED MATERIALS INC·Filed 2018·Granted Mar 31, 2020·4 cites·15 claims
- 1488US11662524B2Forming variable depth structures with laser ablationAPPLIED MATERIALS INC·Filed 2020·Granted May 30, 2023·2 cites·12 claims
- 1588US11512385B2Method of forming gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 29, 2022·3 cites·20 claims
- 1688US11402649B2System and method for optimally forming gratings of diffracted optical elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Aug 2, 2022·2 cites·16 claims
- 1788US10690821B1Methods of producing slanted gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Jun 23, 2020·6 cites·20 claims
- 1888US7755066B2Techniques for improved uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Jul 13, 2010·12 cites·21 claims
- 1988US7355188B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 8, 2008·13 cites·13 claims
- 2087US11016228B2System and method for forming diffracted optical element having varied gratingsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted May 25, 2021·2 cites·20 claims
- 2187US7342240B2Ion beam current monitoringVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 11, 2008·9 cites·21 claims
- 2286US11715621B2Scanned angled etching apparatus and techniques providing separate co-linear radicals and ionsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 1, 2023·3 cites·20 claims
- 2386US11456152B2Modulation of rolling K vectors of angled gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 27, 2022·2 cites·20 claims
- 2485US11480724B2Variable height slanted grating methodAPPLIED MATERIALS INC·Filed 2019·Granted Oct 25, 2022·3 cites·18 claims
- 2585US11335531B2Shadow mask apparatus and methods for variable etch depthsAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·2 cites·12 claims
- 2685US10598832B2System and method for forming diffracted optical element having varied gratingsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Mar 24, 2020·4 cites·13 claims
- 2785US9933314B2Semiconductor workpiece temperature measurement systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Apr 3, 2018·3 cites·11 claims
- 2885US8906727B2Heteroepitaxial growth using ion implantationEVANS MORGAN D·Filed 2012·Granted Dec 9, 2014·3 cites·24 claims
- 2985US6690022B2Ion beam incidence angle and beam divergence monitorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Feb 10, 2004·29 cites·28 claims
- 3084US12106935B2Modulation of rolling k vectors of angled gratingsAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·0 cites·21 claims
- 3184US11670482B2Modulation of rolling k vectors of angled gratingsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 6, 2023·1 cites·4 claims
- 3283US7663125B2Ion beam current uniformity monitor, ion implanter and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 16, 2010·8 cites·18 claims
- 3382US11380578B2Formation of angled gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 5, 2022·2 cites·20 claims
- 3481US12099241B2Forming variable depth structures with laser ablationAPPLIED MATERIALS INC·Filed 2023·Granted Sep 24, 2024·0 cites·12 claims
- 3581US11367589B2Modulation of ion beam angleAPPLIED MATERIALS INC·Filed 2019·Granted Jun 21, 2022·1 cites·18 claims
- 3681US11004648B2Methods and systems for multi-area selective etchingAPPLIED MATERIALS INC·Filed 2019·Granted May 11, 2021·2 cites·20 claims
- 3781US10222202B2Three dimensional structure fabrication control using novel processing systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Mar 5, 2019·2 cites·16 claims
- 3880US11456205B2Methods for variable etch depthsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 27, 2022·1 cites·20 claims
- 3979US10600675B2Techniques and structure for forming thin silicon-on-insulator materialsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Mar 24, 2020·2 cites·19 claims
- 4078US11766744B2Method of forming a plurality of gratingsAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·0 cites·20 claims
- 4178US10957512B1Method and device for a carrier proximity maskAPPLIED MATERIALS INC·Filed 2019·Granted Mar 23, 2021·2 cites·20 claims
- 4278US10795173B2System and method for optimally forming gratings of diffracted optical elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Oct 6, 2020·2 cites·20 claims
- 4377US10090166B2Techniques for forming isolation structures in a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Oct 2, 2018·2 cites·18 claims
- 4477US10081861B2Selective processing of a workpieceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Sep 25, 2018·2 cites·10 claims
- 4576US9899242B2Device and method for substrate heating during transportVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Feb 20, 2018·2 cites·19 claims
- 4676US9633886B2Hybrid thermal electrostatic clampVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 25, 2017·2 cites·19 claims
- 4775US12130465B2Variable height slanted grating methodAPPLIED MATERIALS INC·Filed 2022·Granted Oct 29, 2024·0 cites·9 claims
- 4875US10761334B2System and method for optimally forming gratings of diffracted optical elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Sep 1, 2020·2 cites·20 claims
- 4975US10553448B2Techniques for processing a polycrystalline layer using an angled ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Feb 4, 2020·2 cites·18 claims
- 5074US2025144010A1Guiding Musculoskeletal ProceduresAGITATED SOLUTIONS INC·Filed 2024·Application pending·0 cites
Showing the top 50 of 110 patent records by PatentIndex Score.
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