Inventor · disambiguated record
Feng Yuan Hsu
Also filed as: HSU FENG YUAN
12 granted patents·1 pending application·13 citations·filing 2018–2025
86Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD13
Top patents by PatentIndex Score
13 records- 0196US11782338B2EUV photomask and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 10, 2023·2 cites·20 claims
- 0294US11307489B2EUV photomask and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 19, 2022·4 cites·20 claims
- 0393US11287745B2Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 29, 2022·2 cites·20 claims
- 0492US10866519B1Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·3 cites·20 claims
- 0585US12235573B2EUV photomask and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 0678US12066760B2Reticle-masking structure, extreme ultra violet apparatus, and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 0778US10509311B1Apparatus and method for generating an electromagnetic radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 17, 2019·1 cites·20 claims
- 0876US2025164870A1Euv photomask and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0974US10760896B2Ellipsometer and method for estimating thickness of filmTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 1, 2020·1 cites·20 claims
- 1067US11255658B2Ellipsometer and method for estimating thickness of filmTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 22, 2022·0 cites·20 claims
- 1164US11199767B2Apparatus and method for generating an electromagnetic radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 14, 2021·0 cites·20 claims
- 1257US10880982B2Light generation system using metal-nonmetal compound as precursor and related light generation methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·0 cites·20 claims
- 1350US11260495B2Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 1, 2022·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Feng Yuan Hsu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →