Inventor · disambiguated record
Nickhil Jakatdar
Also filed as: JAKATDAR NICKHIL · JAKATDAR NICKHIL H · JAKATDAR NICKHIL HARSHAVARDHAN
51 granted patents·2 pending applications·2,776 citations·filing 1998–2017
99Inventor score
Top patents by PatentIndex Score
53 records- 0199US6943900B2Generation of a library of periodic grating diffraction signalsTIMBRE TECH INC·Filed 2001·Granted Sep 13, 2005·231 cites·65 claims
- 0299US6785638B2Method and system of dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2001·Granted Aug 31, 2004·315 cites·32 claims
- 0399US6699624B2Grating test patterns and methods for overlay metrologyTIMBRE TECH INC·Filed 2001·Granted Mar 2, 2004·210 cites·39 claims
- 0498US6891626B2Caching of intra-layer calculations for rapid rigorous coupled-wave analysesTIMBRE TECH INC·Filed 2001·Granted May 10, 2005·191 cites·32 claims
- 0598US6772084B2Overlay measurements using periodic gratingsTIMBRE TECH INC·Filed 2002·Granted Aug 3, 2004·203 cites·91 claims
- 0698US6768983B1System and method for real-time library generation of grating profilesTIMBRE TECH INC·Filed 2000·Granted Jul 27, 2004·176 cites·41 claims
- 0798US6721691B2Metrology hardware specification using a hardware simulatorTIMBRE TECH INC·Filed 2002·Granted Apr 13, 2004·162 cites·27 claims
- 0898US6608690B2Optical profilometry of additional-material deviations in a periodic gratingTIMBRE TECH INC·Filed 2001·Granted Aug 19, 2003·179 cites·60 claims
- 0997US6609086B1Profile refinement for integrated circuit metrologyTIMBRE TECH INC·Filed 2002·Granted Aug 19, 2003·113 cites·76 claims
- 1096US9197696B1Offline content distribution networksVuclip·Filed 2015·Granted Nov 24, 2015·58 cites·28 claims
- 1196US7277189B2Generation of a library of periodic grating diffraction signalsTIMBRE TECH INC·Filed 2005·Granted Oct 2, 2007·21 cites·37 claims
- 1296US6433878B1Method and apparatus for the determination of mask rules using scatterometryTIMBRE TECHNOLOGY INC·Filed 2001·Granted Aug 13, 2002·146 cites·20 claims
- 1395US9374685B1Offline content distribution networksVuclip·Filed 2015·Granted Jun 21, 2016·12 cites·20 claims
- 1495US7330279B2Model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2002·Granted Feb 12, 2008·58 cites·52 claims
- 1595US7072049B2Model optimization for structures with additional materialsTIMBRE TECH INC·Filed 2003·Granted Jul 4, 2006·69 cites·32 claims
- 1694US7831528B2Optical metrology of structures formed on semiconductor wafers using machine learning systemsTOKYO ELECTRON LTD·Filed 2009·Granted Nov 9, 2010·29 cites·29 claims
- 1794US7064829B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2003·Granted Jun 20, 2006·47 cites·29 claims
- 1892US6636843B2System and method for grating profile classificationTIMBRE TECH INC·Filed 2000·Granted Oct 21, 2003·44 cites·11 claims
- 1990US7031894B2Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratingsTIMBRE TECH INC·Filed 2002·Granted Apr 18, 2006·40 cites·42 claims
- 2090US6855464B2Grating test patterns and methods for overlay metrologyTIMBRE TECH INC·Filed 2003·Granted Feb 15, 2005·35 cites·31 claims
- 2190US6538731B2System and method for characterizing macro-grating test patterns in advanced lithography and etch processesTIMBRE TECH INC·Filed 2002·Granted Mar 25, 2003·30 cites·20 claims
- 2289US7092110B2Optimized model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2003·Granted Aug 15, 2006·68 cites·46 claims
- 2388US7694244B2Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturingCADENCE DESIGN SYSTEMS INC·Filed 2006·Granted Apr 6, 2010·19 cites·15 claims
- 2488US7271902B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2006·Granted Sep 18, 2007·9 cites·20 claims
- 2588US6928395B2Method and system for dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2004·Granted Aug 9, 2005·28 cites·29 claims
- 2686US6792328B2Metrology diffraction signal adaptation for tool-to-tool matchingTIMBRE TECH INC·Filed 2002·Granted Sep 14, 2004·48 cites·28 claims
- 2785US7593119B2Generation of a library of periodic grating diffraction signalsTOKYO ELECTRON LTD·Filed 2007·Granted Sep 22, 2009·5 cites·30 claims
- 2885US6839145B2Optical profilometry of additional-material deviations in a periodic gratingTIMBRE TECH INC·Filed 2003·Granted Jan 4, 2005·25 cites·56 claims
- 2984US7136796B2Generation and use of integrated circuit profile-based simulation informationTIMBRE TECH INC·Filed 2002·Granted Nov 14, 2006·32 cites·51 claims
- 3082US8407630B1Modeling and cross correlation of design predicted criticalities for optimization of semiconductor manufacturingCHAN KEVIN·Filed 2009·Granted Mar 26, 2013·11 cites·20 claims
- 3182US7505153B2Model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2008·Granted Mar 17, 2009·5 cites·19 claims
- 3282US7450232B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2007·Granted Nov 11, 2008·9 cites·20 claims
- 3381US7580823B2Generation and use of integrated circuit profile-based simulation informationTOKYO ELECTRON LTD·Filed 2006·Granted Aug 25, 2009·9 cites·20 claims
- 3480US6743646B2Balancing planarization of layers and the effect of underlying structure on the metrology signalTIMBRE TECH INC·Filed 2001·Granted Jun 1, 2004·20 cites·20 claims
- 3579US7216045B2Selection of wavelengths for integrated circuit optical metrologyTIMBRE TECH INC·Filed 2002·Granted May 8, 2007·22 cites·2 claims
- 3678US9730033B2Offline content distribution networksVUCLIP (SINGAPORE) PTE LTD·Filed 2016·Granted Aug 8, 2017·2 cites·20 claims
- 3777US6750961B2System and method for characterizing macro-grating test patterns in advanced lithography and etch processesTIMBRE TECH INC·Filed 2003·Granted Jun 15, 2004·12 cites·29 claims
- 3876US7665048B2Method and system for inspection optimization in design and production of integrated circuitsCADENCE DESIGN SYSTEMS INC·Filed 2006·Granted Feb 16, 2010·8 cites·20 claims
- 3973US10367882B2Offline content distribution networksPCCW VUCLIP SINGAPORE PTE LTD·Filed 2017·Granted Jul 30, 2019·1 cites·20 claims
- 4071US6952271B2Caching of intra-layer calculations for rapid rigorous coupled-wave analysesTIMBRE TECH INC·Filed 2004·Granted Oct 4, 2005·13 cites·41 claims
- 4167US6833914B1System and method for efficient simulation of reflectometry response from two-dimensional grating structuresTIMBRE TECH INC·Filed 2001·Granted Dec 21, 2004·6 cites·51 claims
- 4265US8146024B2Method and system for process optimizationCHAN KEVIN·Filed 2006·Granted Mar 27, 2012·4 cites·21 claims
- 4363US7394554B2Selecting a hypothetical profile to use in optical metrologyTIMBRE TECH INC·Filed 2003·Granted Jul 1, 2008·10 cites·32 claims
- 4461US5989763AChemical gas analysis during processing of chemically amplified photoresist systemsNAT SEMICONDUCTOR CORP·Filed 1998·Granted Nov 23, 1999·20 cites·18 claims
- 4559US8136068B2Methods, systems, and computer program products for implementing compact manufacturing models in electronic design automationSONG LI J·Filed 2008·Granted Mar 13, 2012·3 cites·39 claims
- 4656US8156450B2Method and system for mask optimizationCHAN KEVIN·Filed 2006·Granted Apr 10, 2012·1 cites·24 claims
- 4754US6961679B2Method and system of dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2004·Granted Nov 1, 2005·0 cites·12 claims
- 4854US6645824B1Combined optical profilometry and projection microscopy of integrated circuit structuresTIMBRE TECH INC·Filed 2002·Granted Nov 11, 2003·11 cites·33 claims
- 4954US6608686B1Measurement of metal electroplating and seed layer thickness and profileTIMBRE TECH INC·Filed 2001·Granted Aug 19, 2003·6 cites·29 claims
- 5044US7474993B2Selection of wavelengths for integrated circuit optical metrologyTIMBRE TECH INC·Filed 2007·Granted Jan 6, 2009·0 cites·20 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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