Assignee
TIMBRE TECH INC
US·72 granted patents·3 pending applications·3,191 citations·filing 2000–2021
Top patents by PatentIndex Score
75 records- 0199US6943900B2Generation of a library of periodic grating diffraction signalsTIMBRE TECH INC·Filed 2001·Granted Sep 13, 2005·231 cites·65 claims
- 0299US6785638B2Method and system of dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2001·Granted Aug 31, 2004·315 cites·32 claims
- 0399US6699624B2Grating test patterns and methods for overlay metrologyTIMBRE TECH INC·Filed 2001·Granted Mar 2, 2004·210 cites·39 claims
- 0498US6891626B2Caching of intra-layer calculations for rapid rigorous coupled-wave analysesTIMBRE TECH INC·Filed 2001·Granted May 10, 2005·191 cites·32 claims
- 0598US6772084B2Overlay measurements using periodic gratingsTIMBRE TECH INC·Filed 2002·Granted Aug 3, 2004·203 cites·91 claims
- 0698US6768983B1System and method for real-time library generation of grating profilesTIMBRE TECH INC·Filed 2000·Granted Jul 27, 2004·176 cites·41 claims
- 0798US6721691B2Metrology hardware specification using a hardware simulatorTIMBRE TECH INC·Filed 2002·Granted Apr 13, 2004·162 cites·27 claims
- 0898US6608690B2Optical profilometry of additional-material deviations in a periodic gratingTIMBRE TECH INC·Filed 2001·Granted Aug 19, 2003·179 cites·60 claims
- 0997US6609086B1Profile refinement for integrated circuit metrologyTIMBRE TECH INC·Filed 2002·Granted Aug 19, 2003·113 cites·76 claims
- 1096US7277189B2Generation of a library of periodic grating diffraction signalsTIMBRE TECH INC·Filed 2005·Granted Oct 2, 2007·21 cites·37 claims
- 1195US7330279B2Model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2002·Granted Feb 12, 2008·58 cites·52 claims
- 1295US7072049B2Model optimization for structures with additional materialsTIMBRE TECH INC·Filed 2003·Granted Jul 4, 2006·69 cites·32 claims
- 1394US7280229B2Examining a structure formed on a semiconductor wafer using machine learning systemsTIMBRE TECH INC·Filed 2004·Granted Oct 9, 2007·51 cites·24 claims
- 1494US7064829B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2003·Granted Jun 20, 2006·47 cites·29 claims
- 1593US7388677B2Optical metrology optimization for repetitive structuresTIMBRE TECH INC·Filed 2005·Granted Jun 17, 2008·26 cites·29 claims
- 1693US6775015B2Optical metrology of single featuresTIMBRE TECH INC·Filed 2002·Granted Aug 10, 2004·42 cites·55 claims
- 1792US7224471B2Azimuthal scanning of a structure formed on a semiconductor waferTIMBRE TECH INC·Filed 2003·Granted May 29, 2007·45 cites·23 claims
- 1892US7126700B2Parametric optimization of optical metrology modelTIMBRE TECH INC·Filed 2003·Granted Oct 24, 2006·59 cites·56 claims
- 1992US6947141B2Overlay measurements using zero-order cross polarization measurementsTIMBRE TECH INC·Filed 2004·Granted Sep 20, 2005·37 cites·20 claims
- 2092US6804005B2Overlay measurements using zero-order cross polarization measurementsTIMBRE TECH INC·Filed 2002·Granted Oct 12, 2004·38 cites·116 claims
- 2192US6636843B2System and method for grating profile classificationTIMBRE TECH INC·Filed 2000·Granted Oct 21, 2003·44 cites·11 claims
- 2291US7171284B2Optical metrology model optimization based on goalsTIMBRE TECH INC·Filed 2004·Granted Jan 30, 2007·49 cites·55 claims
- 2391US7065423B2Optical metrology model optimization for process controlTIMBRE TECH INC·Filed 2004·Granted Jun 20, 2006·58 cites·35 claims
- 2491US7046375B2Edge roughness measurement in optical metrologyTIMBRE TECH INC·Filed 2003·Granted May 16, 2006·41 cites·46 claims
- 2590US7031894B2Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratingsTIMBRE TECH INC·Filed 2002·Granted Apr 18, 2006·40 cites·42 claims
- 2690US6855464B2Grating test patterns and methods for overlay metrologyTIMBRE TECH INC·Filed 2003·Granted Feb 15, 2005·35 cites·31 claims
- 2790US6538731B2System and method for characterizing macro-grating test patterns in advanced lithography and etch processesTIMBRE TECH INC·Filed 2002·Granted Mar 25, 2003·30 cites·20 claims
- 2889US7467064B2Transforming metrology data from a semiconductor treatment system using multivariate analysisTIMBRE TECH INC·Filed 2006·Granted Dec 16, 2008·16 cites·22 claims
- 2989US7092110B2Optimized model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2003·Granted Aug 15, 2006·68 cites·46 claims
- 3088US7271902B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2006·Granted Sep 18, 2007·9 cites·20 claims
- 3188US6928395B2Method and system for dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2004·Granted Aug 9, 2005·28 cites·29 claims
- 3287US7355728B2Optical metrology model optimization for repetitive structuresTIMBRE TECH INC·Filed 2005·Granted Apr 8, 2008·20 cites·33 claims
- 3386US7444196B2Optimized characterization of wafers structures for optical metrologyTIMBRE TECH INC·Filed 2006·Granted Oct 28, 2008·10 cites·32 claims
- 3486US7428060B2Optimization of diffraction order selection for two-dimensional structuresTIMBRE TECH INC·Filed 2006·Granted Sep 23, 2008·17 cites·41 claims
- 3586US7302367B2Library accuracy enhancement and evaluationTIMBRE TECH INC·Filed 2006·Granted Nov 27, 2007·14 cites·22 claims
- 3686US6792328B2Metrology diffraction signal adaptation for tool-to-tool matchingTIMBRE TECH INC·Filed 2002·Granted Sep 14, 2004·48 cites·28 claims
- 3785US6839145B2Optical profilometry of additional-material deviations in a periodic gratingTIMBRE TECH INC·Filed 2003·Granted Jan 4, 2005·25 cites·56 claims
- 3884US7414733B2Azimuthal scanning of a structure formed on a semiconductor waferTIMBRE TECH INC·Filed 2007·Granted Aug 19, 2008·7 cites·18 claims
- 3984US7379192B2Optical metrology of single featuresTIMBRE TECH INC·Filed 2006·Granted May 27, 2008·6 cites·19 claims
- 4084US7136796B2Generation and use of integrated circuit profile-based simulation informationTIMBRE TECH INC·Filed 2002·Granted Nov 14, 2006·32 cites·51 claims
- 4184US6791679B2Adaptive correlation of pattern resist structures using optical metrologyTIMBRE TECH INC·Filed 2003·Granted Sep 14, 2004·32 cites·37 claims
- 4283US6591405B1Clustering for data compressionTIMBRE TECH INC·Filed 2000·Granted Jul 8, 2003·22 cites·33 claims
- 4382US7505153B2Model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2008·Granted Mar 17, 2009·5 cites·19 claims
- 4482US7450232B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2007·Granted Nov 11, 2008·9 cites·20 claims
- 4582US7395132B2Optical metrology model optimization for process controlTIMBRE TECH INC·Filed 2007·Granted Jul 1, 2008·11 cites·28 claims
- 4682US6853942B2Metrology hardware adaptation with universal libraryTIMBRE TECH INC·Filed 2002·Granted Feb 8, 2005·20 cites·62 claims
- 4780US7474420B2In-die optical metrologyTIMBRE TECH INC·Filed 2006·Granted Jan 6, 2009·11 cites·34 claims
- 4880US6743646B2Balancing planarization of layers and the effect of underlying structure on the metrology signalTIMBRE TECH INC·Filed 2001·Granted Jun 1, 2004·20 cites·20 claims
- 4979US7216045B2Selection of wavelengths for integrated circuit optical metrologyTIMBRE TECH INC·Filed 2002·Granted May 8, 2007·22 cites·2 claims
- 5077US6750961B2System and method for characterizing macro-grating test patterns in advanced lithography and etch processesTIMBRE TECH INC·Filed 2003·Granted Jun 15, 2004·12 cites·29 claims
Showing the top 50 of 75 patent records by PatentIndex Score.
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