Inventor · disambiguated record
Georg Soumagne
Also filed as: SOUMAGNE GEORG
19 granted patents·5 pending applications·107 citations·filing 2002–2024
93Inventor score
Top patents by PatentIndex Score
24 records- 0189US10136510B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2017·Granted Nov 20, 2018·4 cites·14 claims
- 0289US8067756B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2009·Granted Nov 29, 2011·24 cites·12 claims
- 0386US8198613B2Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source deviceMORIYA MASATO·Filed 2009·Granted Jun 12, 2012·12 cites·55 claims
- 0486US7915600B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2007·Granted Mar 29, 2011·22 cites·20 claims
- 0585US8492738B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2012·Granted Jul 23, 2013·6 cites·11 claims
- 0681US8143606B2Extreme ultra violet light source deviceKOMORI HIROSHI·Filed 2007·Granted Mar 27, 2012·13 cites·15 claims
- 0780US8586953B2Extreme ultra violet light source deviceKOMORI HIROSHI·Filed 2012·Granted Nov 19, 2013·4 cites·18 claims
- 0876US8592787B2Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source deviceMORIYA MASATO·Filed 2012·Granted Nov 26, 2013·3 cites·39 claims
- 0971US10455679B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2017·Granted Oct 22, 2019·1 cites·11 claims
- 1068US9661730B2Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a targetGIGAPHOTON INC·Filed 2016·Granted May 23, 2017·1 cites·6 claims
- 1167US8513630B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2011·Granted Aug 20, 2013·2 cites·6 claims
- 1263US7928418B2Extreme ultra violet light source apparatusGIGAHOTON INC·Filed 2009·Granted Apr 19, 2011·7 cites·7 claims
- 1361US8288743B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2009·Granted Oct 16, 2012·4 cites·21 claims
- 1458US8227778B2Semiconductor exposure device using extreme ultra violet radiationMORIYA MASATO·Filed 2009·Granted Jul 24, 2012·3 cites·18 claims
- 1553US2024422889A1Extreme ultraviolet light generation chamber device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2024·Application pending·0 cites
- 1649US11337292B1Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted May 17, 2022·0 cites·18 claims
- 1749US2014021376A1Extreme ultra violet light source deviceGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 1848US8507885B2Semiconductor exposure device using extreme ultra violet radiationMORIYA MASATO·Filed 2012·Granted Aug 13, 2013·0 cites·20 claims
- 1947US7006309B2Prism unit and laser deviceGIGAPHOTON INC·Filed 2002·Granted Feb 28, 2006·1 cites·4 claims
- 2046US11145429B2Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic deviceGIGAPHOTON INC·Filed 2020·Granted Oct 12, 2021·0 cites·20 claims
- 2143US8354657B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2011·Granted Jan 15, 2013·0 cites·8 claims
- 2243US2017336282A1Spheroidal mirror reflectivity measuring apparatus for extreme ultraviolet lightUNIV TOKYO·Filed 2017·Application pending·0 cites
- 2336US2010176312A1Extreme ultra violet light source apparatusKOMORI HIROSHI·Filed 2009·Application pending·0 cites
- 2433US2017127505A1Extreme ultraviolet light generation system and extreme ultraviolet light generation methodINST FOR LASER TECH·Filed 2017·Application pending·0 cites
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