Inventor · disambiguated record
Vadim Boguslavskiy
Also filed as: BOGUSLAVSKIY VADIM
30 granted patents·4 pending applications·1,465 citations·filing 1997–2023
97Inventor score
Top patents by PatentIndex Score
34 records- 0197US6492625B1Apparatus and method for controlling temperature uniformity of substratesEMCORE CORP·Filed 2000·Granted Dec 10, 2002·545 cites·18 claims
- 0297US5759281ACVD reactor for uniform heating with radiant heating filamentsEMCORE CORP·Filed 1997·Granted Jun 2, 1998·413 cites·29 claims
- 0395US8021487B2Wafer carrier with hubVEECO INSTR INC·Filed 2007·Granted Sep 20, 2011·33 cites·24 claims
- 0495US7276124B2Reactor having a movable shutterVEECO INSTR INC·Filed 2005·Granted Oct 2, 2007·50 cites·6 claims
- 0592US7235139B2Wafer carrier for growing GaN wafersVEECO INSTR INC·Filed 2004·Granted Jun 26, 2007·42 cites·23 claims
- 0691US8888360B2Methods and systems for in-situ pyrometer calibrationGURARY ALEXANDER I·Filed 2011·Granted Nov 18, 2014·13 cites·24 claims
- 0791US6506252B2Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor depositionEMCORE CORP·Filed 2001·Granted Jan 14, 2003·46 cites·29 claims
- 0890US6902623B2Reactor having a movable shutterVEECO INSTR INC·Filed 2002·Granted Jun 7, 2005·47 cites·23 claims
- 0986US6398406B1Temperature determination using pyrometrySANDIA CORP·Filed 2000·Granted Jun 4, 2002·46 cites·20 claims
- 1083US9653340B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted May 16, 2017·6 cites·16 claims
- 1183US6685774B2Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor depositionEMCORE CORP·Filed 2002·Granted Feb 3, 2004·22 cites·15 claims
- 1282USD687791SMulti-keyed wafer carrierKRISHNAN SANDEEP·Filed 2012·Granted Aug 13, 2013·28 cites·1 claims
- 1381US6726769B2Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor depositionEMCORE CORP·Filed 2002·Granted Apr 27, 2004·19 cites·42 claims
- 1480USD687790SKeyed wafer carrierKRISHNAN SANDEEP·Filed 2012·Granted Aug 13, 2013·26 cites·1 claims
- 1579US6349270B1Method and apparatus for measuring the temperature of objects on a fast moving holderEMCORE CORP·Filed 1999·Granted Feb 19, 2002·61 cites·51 claims
- 1676US5840124AWafer carrier with flexible wafer flat holderEMCORE CORP·Filed 1997·Granted Nov 24, 1998·45 cites·63 claims
- 1773US9719629B2Supporting system for a heating element and heating systemPLANSEE SE·Filed 2014·Granted Aug 1, 2017·3 cites·10 claims
- 1869US8958061B2Heated wafer carrier profilingBOGUSLAVSKIY VADIM·Filed 2012·Granted Feb 17, 2015·2 cites·33 claims
- 1965US8231940B2Wafer processing method with carrier hub removalBOGUSLAVSKIY VADIM·Filed 2011·Granted Jul 31, 2012·1 cites·15 claims
- 2055US2023363244A1Organic vapor jet printing systemUNIVERSAL DISPLAY CORP·Filed 2023·Application pending·0 cites
- 2154US7666323B2System and method for increasing the emissivity of a materialVEECO INSTR INC·Filed 2004·Granted Feb 23, 2010·2 cites·14 claims
- 2253US10002805B2Processing methods and apparatus with temperature distribution controlVEECO INSTR INC·Filed 2016·Granted Jun 19, 2018·0 cites·16 claims
- 2349US9816184B2Keyed wafer carrierKRISHNAN SANDEEP·Filed 2012·Granted Nov 14, 2017·0 cites·25 claims
- 2449US2017191157A1Keyed wafer carrierVEECO INSTR INC·Filed 2017·Application pending·0 cites
- 2549US2013298831A1Automated process chamber cleaning in material deposition systemsSHAMOUN BASSAM·Filed 2012·Application pending·0 cites
- 2648US2011114022A1Wafer carrier with hubVEECO INSTR INC·Filed 2008·Application pending·0 cites
- 2746US9324590B2Processing methods and apparatus with temperature distribution controlGURARY ALEX·Filed 2010·Granted Apr 26, 2016·0 cites·16 claims
- 2845US9497803B2Supporting system for a heating element and heating systemPLANSEE SE·Filed 2014·Granted Nov 15, 2016·0 cites·13 claims
- 2945USD726133SKeyed spindleKRISHNAN SANDEEP·Filed 2012·Granted Apr 7, 2015·4 cites·1 claims
- 3044USD748591SKeyed spindleVEECO INSTR INC·Filed 2015·Granted Feb 2, 2016·3 cites·1 claims
- 3142USD711332SMulti-keyed spindleKRISHNAN SANDEEP·Filed 2012·Granted Aug 19, 2014·4 cites·1 claims
- 3240USD712852SSpindle keyKRISHNAN SANDEEP·Filed 2012·Granted Sep 9, 2014·3 cites·1 claims
- 3336US10136472B2Terminal for mechanical support of a heating elementPLANKENSTEINER ARNO·Filed 2012·Granted Nov 20, 2018·0 cites·10 claims
- 3434USD744967SSpindle keyVEECO INSTR INC·Filed 2014·Granted Dec 8, 2015·1 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →