Inventor · disambiguated record
Masato Kumazawa
Also filed as: KUMAZAWA MASATO
13 granted patents·3 pending applications·747 citations·filing 1986–2017
93Inventor score
Top patents by PatentIndex Score
16 records- 0199US6795169B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2003·Granted Sep 21, 2004·481 cites·21 claims
- 0297US5729331AExposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 1995·Granted Mar 17, 1998·134 cites·74 claims
- 0390US6556278B1Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjustedNIKON CORP·Filed 2000·Granted Apr 29, 2003·26 cites·62 claims
- 0486US7372544B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2007·Granted May 13, 2008·8 cites·16 claims
- 0585US7372543B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2006·Granted May 13, 2008·7 cites·28 claims
- 0682US6509954B1Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and methodNIKON CORP·Filed 2000·Granted Jan 21, 2003·13 cites·82 claims
- 0777US7023527B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2004·Granted Apr 4, 2006·7 cites·20 claims
- 0877US6351305B1Exposure apparatus and exposure method for transferring pattern onto a substrateNIKON CORP·Filed 1998·Granted Feb 26, 2002·26 cites·136 claims
- 0964US6157497AExposure apparatusNIKON CORP·Filed 1996·Granted Dec 5, 2000·30 cites·78 claims
- 1060US4744662AApparatus for measuring dimensions of micropatternNIPPON KOGAKU KK·Filed 1986·Granted May 17, 1988·15 cites·7 claims
- 1153US8867019B2Projection optical system, exposure apparatus, exposure method, display manufacturing method, mask, and mask manufacturing methodNIKON CORP·Filed 2012·Granted Oct 21, 2014·0 cites·23 claims
- 1250US8305556B2Projection optical system, exposure apparatus, exposure method, display manufacturing method, mask, and mask manufacturing methodKUMAZAWA MASATO·Filed 2008·Granted Nov 6, 2012·0 cites·9 claims
- 1342US2008165333A1Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing methodNIKON CORP·Filed 2007·Application pending·0 cites
- 1438US8130364B2Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing methodKUMAZAWA MASATO·Filed 2007·Granted Mar 6, 2012·0 cites·21 claims
- 1538US2018045921A1Imaging lens and image capturing deviceNIPPON KOGAKU KK·Filed 2017·Application pending·0 cites
- 1630US2002171944A1Condenser optical system and illumination optical apparatus provided with the optical systemNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →