Inventor · disambiguated record
Tadashi Kamata
Also filed as: KAMATA TADASHI
2 granted patents·200 citations·filing 1990–1992
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0184US5244820ASemiconductor integrated circuit device, method for producing the same, and ion implanter for use in the methodKAMATA TADASHI·Filed 1992·Granted Sep 14, 1993·113 cites·37 claims
- 0280US5134301AIon implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devicesHITACHI LTD·Filed 1990·Granted Jul 28, 1992·87 cites·19 claims
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