Inventor · disambiguated record
Yujun Deng
Also filed as: DENG YUJUN
16 granted patents·192 citations·filing 2011–2018
93Inventor score
Top patents by PatentIndex Score
16 records- 0199US8929406B2193NM laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Jan 6, 2015·63 cites·26 claims
- 0297US9529182B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Dec 27, 2016·33 cites·3 claims
- 0397US9151940B2Semiconductor inspection and metrology system using laser pulse multiplierKLA TENCOR CORP·Filed 2012·Granted Oct 6, 2015·32 cites·16 claims
- 0496US9748729B2183NM laser and inspection systemKLA TENCOR CORP·Filed 2015·Granted Aug 29, 2017·14 cites·13 claims
- 0594US9318869B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Apr 19, 2016·11 cites·20 claims
- 0691US9525265B2Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prismsKLA TENCOR CORP·Filed 2015·Granted Dec 20, 2016·6 cites·9 claims
- 0790US9804101B2System and method for reducing the bandwidth of a laser and an inspection system and method using a laserKLA TENCOR CORP·Filed 2014·Granted Oct 31, 2017·8 cites·12 claims
- 0889US9419407B2Laser assembly and inspection system using monolithic bandwidth narrowing apparatusKLA TENCOR CORP·Filed 2015·Granted Aug 16, 2016·5 cites·27 claims
- 0987US9768577B2Semiconductor inspection and metrology system using laser pulse multiplierKLA TENCOR CORP·Filed 2015·Granted Sep 19, 2017·5 cites·21 claims
- 1086US8902939B2Broadly tunable optical parametric oscillatorKAFKA JAMES D·Filed 2011·Granted Dec 2, 2014·8 cites·18 claims
- 1181US10495582B2System and method for reducing the bandwidth of a laser and an inspection system and method using a laserKLA TENCOR CORP·Filed 2017·Granted Dec 3, 2019·1 cites·16 claims
- 1281US10199149B2183NM laser and inspection systemKLA TENCOR CORP·Filed 2017·Granted Feb 5, 2019·2 cites·24 claims
- 1381US10014652B2Broadly tunable optical parametric oscillatorNEWPORT CORP·Filed 2014·Granted Jul 3, 2018·4 cites·45 claims
- 1469US10439355B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2018·Granted Oct 8, 2019·0 cites·7 claims
- 1565US9935421B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2016·Granted Apr 3, 2018·0 cites·24 claims
- 1656US10044164B2Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prismsKLA TENCOR CORP·Filed 2016·Granted Aug 7, 2018·0 cites·10 claims
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