Inventor · disambiguated record
Yungshan Chang
Also filed as: CHANG YUNGSHAN
8 granted patents·2 pending applications·2 citations·filing 2014–2018
75Inventor score
Files withTEXAS INSTRUMENTS INC10
Top patents by PatentIndex Score
10 records- 0171US9834433B2Piezoelectric optical MEMS device with embedded moisture layersTEXAS INSTRUMENTS INC·Filed 2014·Granted Dec 5, 2017·2 cites·10 claims
- 0256US10829365B2Piezoelectric optical MEMS device with embedded moisture layersTEXAS INSTRUMENTS INC·Filed 2017·Granted Nov 10, 2020·0 cites·15 claims
- 0355US9405089B2High-temperature isotropic plasma etching process to prevent electrical shortsTEXAS INSTRUMENTS INC·Filed 2014·Granted Aug 2, 2016·0 cites·9 claims
- 0453US11148939B2Stress compensation for piezoelectric optical MEMS devicesTEXAS INSTRUMENTS INC·Filed 2018·Granted Oct 19, 2021·0 cites·18 claims
- 0553US9939710B2High-temperature isotropic plasma etching process to prevent electrical shortsTEXAS INSTRUMENTS INC·Filed 2016·Granted Apr 10, 2018·0 cites·16 claims
- 0652US9890040B2Stress compensation for piezoelectric optical MEMS devicesTEXAS INSTRUMENTS INC·Filed 2014·Granted Feb 13, 2018·0 cites·16 claims
- 0751US10319899B2Method of forming a semiconductor deviceTEXAS INSTRUMENTS INC·Filed 2017·Granted Jun 11, 2019·0 cites·20 claims
- 0844US9755139B2Piezoeletric wet etch process with reduced resist lifting and controlled undercutTEXAS INSTRUMENTS INC·Filed 2015·Granted Sep 5, 2017·0 cites·20 claims
- 0942US2015376000A1Method for reducing discharge defects and electrode delamination in piezoelectric optical mems devicesTEXAS INSTRUMENTS INC·Filed 2014·Application pending·0 cites
- 1033US2015380635A1METHODS TO IMPROVE THE CRYSTALLINITY OF PbZrTiO3 AND Pt FILMS FOR MEMS APPLICATIONSTEXAS INSTRUMENTS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →