Inventor · disambiguated record
Martin Willmann
Also filed as: WILLMANN MARTIN
8 granted patents·339 citations·filing 1991–1998
90Inventor score
Files withBOSCH GMBH ROBERT8
Top patents by PatentIndex Score
8 records- 0195US5216273AMicrovalve of multilayer silicon constructionBOSCH GMBH ROBERT·Filed 1991·Granted Jun 1, 1993·103 cites·26 claims
- 0281US5273939AMethod of assembling micromechanical sensorsBOSCH GMBH ROBERT·Filed 1992·Granted Dec 28, 1993·71 cites·11 claims
- 0378US5542558AMethod for manufacturing micro-mechanical components using selective anodization of siliconBOSCH GMBH ROBERT·Filed 1994·Granted Aug 6, 1996·36 cites·5 claims
- 0476US5310450AMethod of making an acceleration sensorBOSCH GMBH ROBERT·Filed 1992·Granted May 10, 1994·34 cites·8 claims
- 0570US5324410ADevice for one-sided etching of a semiconductor waferBOSCH GMBH ROBERT·Filed 1991·Granted Jun 28, 1994·51 cites·19 claims
- 0665US5461917AAcceleration sensorBOSCH GMBH ROBERT·Filed 1993·Granted Oct 31, 1995·23 cites·12 claims
- 0756US5355569AMethod of making sensorBOSCH GMBH ROBERT·Filed 1992·Granted Oct 18, 1994·16 cites·10 claims
- 0831US6101872ASensor having a thin film elementBOSCH GMBH ROBERT·Filed 1998·Granted Aug 15, 2000·5 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →