Inventor · disambiguated record
Shigeru Maida
Also filed as: MAIDA SHIGERU
19 granted patents·1 pending application·69 citations·filing 2001–2016
92Inventor score
Top patents by PatentIndex Score
20 records- 0191US8105734B2Titania-doped quartz glass member and making methodMAIDA SHIGERU·Filed 2009·Granted Jan 31, 2012·12 cites·7 claims
- 0291US7585598B2Titania-doped quartz glass and making method, EUV lithographic member and photomask substrateSHINETSU CHEMICAL CO·Filed 2006·Granted Sep 8, 2009·11 cites·13 claims
- 0388US7935648B2Titania-doped quartz glass for nanoimprint moldsSHINETSU CHEMICAL CO·Filed 2008·Granted May 3, 2011·13 cites·8 claims
- 0485US8820122B2Titania-doped quartz glass and making methodMAIDA SHIGERU·Filed 2011·Granted Sep 2, 2014·6 cites·10 claims
- 0583US8377612B2Titania-doped quartz glass member and making methodSHINETSU CHEMICAL CO·Filed 2012·Granted Feb 19, 2013·3 cites·14 claims
- 0681US9278881B2EUV lithography member, making method, and titania-doped quartz glassSHINETSU CHEMICAL CO·Filed 2014·Granted Mar 8, 2016·3 cites·8 claims
- 0781US7923394B2Titania-doped quartz glass for nanoimprint moldsSHINETSU CHEMICAL CO·Filed 2008·Granted Apr 12, 2011·4 cites·8 claims
- 0878US9346700B2Titania-doped quartz glass and making methodMAIDA SHIGERU·Filed 2012·Granted May 24, 2016·2 cites·6 claims
- 0974US9056785B2Nanoimprint mold-forming synthetic quartz glass and making methodSHINETSU CHEMICAL CO·Filed 2013·Granted Jun 16, 2015·3 cites·7 claims
- 1072US8629071B2Titania and sulfur co-doped quartz glass member and making methodSHINETSU CHEMICAL CO·Filed 2013·Granted Jan 14, 2014·1 cites·11 claims
- 1171US9746773B2Titania-doped quartz glass and making methodSHINETSU CHEMICAL CO·Filed 2013·Granted Aug 29, 2017·1 cites·9 claims
- 1267US9612525B2Titania-doped quartz glass and making methodSHINETSU CHEMICAL CO·Filed 2016·Granted Apr 4, 2017·0 cites·4 claims
- 1363US6990836B2Method of producing fluorine-containing synthetic quartz glassSHINETSU CHEMICAL CO·Filed 2001·Granted Jan 31, 2006·6 cites·13 claims
- 1462US7849711B2Titania-doped quartz glass and making method, EUV lithographic member and photomask substrateSHINETSU CHEMICAL CO·Filed 2009·Granted Dec 14, 2010·0 cites·2 claims
- 1559US10114280B2Titania-doped quartz glass and making methodSHINETSU CHEMICAL CO·Filed 2016·Granted Oct 30, 2018·0 cites·9 claims
- 1658US7159418B2Method of producing synthetic quartz glassSHINETSU CHEMICAL CO·Filed 2001·Granted Jan 9, 2007·4 cites·11 claims
- 1755US8539797B2Titania and sulfur co-doped quartz glass member and making methodMAIDA SHIGERU·Filed 2010·Granted Sep 24, 2013·0 cites·11 claims
- 1852US9296636B2Titania doped quartz glass and making methodMAIDA SHIGERU·Filed 2012·Granted Mar 29, 2016·0 cites·2 claims
- 1951US2011159413A1Titania-doped quartz glass and making methodSHINETSU CHEMICAL CO·Filed 2010·Application pending·0 cites
- 2042US9067814B2Method of producing synthetic quartz glass for excimer laserMAIDA SHIGERU·Filed 2010·Granted Jun 30, 2015·0 cites·6 claims
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