Inventor · disambiguated record
Tetsuya Saitou
Also filed as: SAITOU TETSUYA
8 granted patents·4 pending applications·7 citations·filing 2005–2021
75Inventor score
Top patents by PatentIndex Score
12 records- 0182US9885114B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 6, 2018·2 cites·17 claims
- 0281US9441293B2Film-forming apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Sep 13, 2016·3 cites·3 claims
- 0368US7369338B2Servo writer, and write and inspection method of servo signalFUJIFILM CORP·Filed 2005·Granted May 6, 2008·2 cites·12 claims
- 0456US11236423B2Film-forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 1, 2022·0 cites·17 claims
- 0551US2014090599A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0650US2024308188A1Sealant film and application thereofPRIME POLYMER CO LTD·Filed 2021·Application pending·0 cites
- 0749US11335542B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 17, 2022·0 cites·17 claims
- 0847US11664266B2Substrate processing apparatus and substrate delivery methodTOKYO ELECTRON LTD·Filed 2020·Granted May 30, 2023·0 cites·20 claims
- 0946US12202233B2Laminates and liquid packaging bagsPRIME POLYMER CO LTD·Filed 2019·Granted Jan 21, 2025·0 cites·7 claims
- 1043US2021005502A1Stage, substrate processing apparatus and stage assembling methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1142US11527404B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 13, 2022·0 cites·19 claims
- 1240US2020335385A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →