Inventor · disambiguated record
Tristan Y. Ma
Also filed as: MA TRISTAN · MA TRISTAN Y · MA TRISTAN YONGHUI
28 granted patents·2 pending applications·59 citations·filing 2012–2022
94Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT ASS INC18APPLIED MATERIALS INC7VARIAN SEMICONDUCTOR EQUIPMENT3DARBY BLAKE L1MA TRISTAN1
Top patents by PatentIndex Score
30 records- 0197US9377692B2Electric/magnetic field guided acid diffusionAPPLIED MATERIALS INC·Filed 2014·Granted Jun 28, 2016·18 cites·12 claims
- 0293US11942361B2Semiconductor device cavity formation using directional depositionAPPLIED MATERIALS INC·Filed 2021·Granted Mar 26, 2024·2 cites·15 claims
- 0393US9385219B2Method and apparatus for selective depositionAPPLIED MATERIALS INC·Filed 2015·Granted Jul 5, 2016·11 cites·20 claims
- 0489US11459652B2Techniques and device structures based upon directional dielectric deposition and bottom-up fillAPPLIED MATERIALS INC·Filed 2020·Granted Oct 4, 2022·2 cites·20 claims
- 0588US10310379B2Multiple patterning approach using ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 4, 2019·5 cites·18 claims
- 0688US9659784B1Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted May 23, 2017·5 cites·16 claims
- 0781US10222202B2Three dimensional structure fabrication control using novel processing systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Mar 5, 2019·2 cites·16 claims
- 0876US9520290B1Ion implantation for improved etch performanceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 13, 2016·2 cites·19 claims
- 0975US10553448B2Techniques for processing a polycrystalline layer using an angled ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Feb 4, 2020·2 cites·18 claims
- 1075US9336998B2Apparatus and method for dynamic control of ion beam energy and angleVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted May 10, 2016·3 cites·18 claims
- 1173US12422210B2Techniques and device structures based upon directional dielectric deposition and bottom-up fillAPPLIED MATERIALS INC·Filed 2022·Granted Sep 23, 2025·0 cites·19 claims
- 1270US12191156B2Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 7, 2025·0 cites·17 claims
- 1368US10269663B2Critical dimensions variance compensationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 23, 2019·1 cites·9 claims
- 1468US10002764B1Sputter etch material selectivityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Jun 19, 2018·1 cites·19 claims
- 1567US10990014B2Performance improvement of EUV photoresist by ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Apr 27, 2021·0 cites·11 claims
- 1667US10204909B2Non-uniform gate oxide thickness for DRAM deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Feb 12, 2019·1 cites·14 claims
- 1767US9929015B2High efficiency apparatus and method for depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 27, 2018·1 cites·15 claims
- 1866US9268228B2Techniques for patterning a substrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Feb 23, 2016·1 cites·15 claims
- 1965US9460961B2Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Oct 4, 2016·1 cites·12 claims
- 2065US8906576B2Material engineering for high performance Li-ion battery electrodesDARBY BLAKE L·Filed 2012·Granted Dec 9, 2014·1 cites·18 claims
- 2161US10545408B2Performance improvement of EUV photoresist by ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 28, 2020·0 cites·16 claims
- 2256US11778832B2Wordline contact formation in NAND devicesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·20 claims
- 2355US9885957B2Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Feb 6, 2018·0 cites·14 claims
- 2452US9435038B2Ion implant assisted metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 6, 2016·0 cites·17 claims
- 2552US2014037858A1Anisotropic surface energy modulation by ion implantationMA TRISTAN·Filed 2012·Application pending·0 cites
- 2650US9396965B2Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Jul 19, 2016·0 cites·13 claims
- 2747US2016379844A1Techniques and apparatus for anisotropic metal etchingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Application pending·0 cites
- 2843US10937663B2Selective photoresist etching for bridge defect removalVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Mar 2, 2021·0 cites·20 claims
- 2942US9512517B2Multiple exposure treatment for processing a patterning featureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 6, 2016·0 cites·20 claims
- 3038US9735013B2Ion implantation for improved contact hole critical dimension uniformityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 15, 2017·0 cites·18 claims
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