Inventor · disambiguated record
Pengli Zhang
Also filed as: ZHANG PENGLI
3 granted patents·2 pending applications·1 citations·filing 2013–2017
45Inventor score
Top patents by PatentIndex Score
5 records- 0163US9448488B2Off-axis alignment system and alignment methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 20, 2016·1 cites·16 claims
- 0236US11549891B2Automatic optical inspection device and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jan 10, 2023·0 cites·14 claims
- 0336US2018195971A1Apparatus and Method for 3D Surface InspectionSHANGHAI MICROELECTRONICS EQUI·Filed 2017·Application pending·0 cites
- 0433US10942129B2Chip defect detection device and detection methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Mar 9, 2021·0 cites·10 claims
- 0523US2017144251A1Laser annealing deviceSHANGHAI MICROELECTRONICS EQUI·Filed 2015·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →