Inventor · disambiguated record
Kaoru Tsuruta
Also filed as: TSURUTA KAORU
5 granted patents·3 pending applications·19 citations·filing 2009–2025
73Inventor score
Top patents by PatentIndex Score
8 records- 0186US9190245B2Charged particle beam writing apparatus, and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 17, 2015·6 cites·11 claims
- 0281US8183544B2Correcting substrate for charged particle beam lithography apparatusTSURUTA KAORU·Filed 2009·Granted May 22, 2012·10 cites·8 claims
- 0365US2025372346A1Mark position measurement method, multi-charged particle beam writing method and multi-charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0464US8748843B2Charged particle beam drawing apparatus and charged particle beam drawing methodTSURUTA KAORU·Filed 2012·Granted Jun 10, 2014·2 cites·15 claims
- 0564US2025364208A1Background waveform acquisition method, mark position detection method, electron beam writing method, and electron beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0663US9472372B2Charged particle beam writing apparatus and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Oct 18, 2016·1 cites·13 claims
- 0741US11352694B2Drawing apparatus and control method thereofNUFLARE TECHNOLOGY INC·Filed 2018·Granted Jun 7, 2022·0 cites·4 claims
- 0833US2011089346A1Method and system for pattern writing with charged-particle beamNUFLARE TECHNOLOGY INC·Filed 2010·Application pending·0 cites
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