Assignee
TSURUTA KAORU
JP·2 granted patents·12 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0181US8183544B2Correcting substrate for charged particle beam lithography apparatusTSURUTA KAORU·Filed 2009·Granted May 22, 2012·10 cites·8 claims
- 0264US8748843B2Charged particle beam drawing apparatus and charged particle beam drawing methodTSURUTA KAORU·Filed 2012·Granted Jun 10, 2014·2 cites·15 claims
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