Inventor · disambiguated record
Mitsuaki Minato
Also filed as: MINATO MITSUAKI
10 granted patents·485 citations·filing 1980–1993
92Inventor score
Files withTOKYO OHKA KOGYO CO LTD10
Top patents by PatentIndex Score
10 records- 0192US5584647AObject handling devicesTOKYO OHKA KOGYO CO LTD·Filed 1993·Granted Dec 17, 1996·146 cites·4 claims
- 0292US4277525ALiquid compositions for forming silica coating filmsTOKYO OHKA KOGYO CO LTD·Filed 1980·Granted Jul 7, 1981·61 cites·14 claims
- 0391US5435880APlasma processing apparatusTOKYO OHKA KOGYO CO LTD·Filed 1993·Granted Jul 25, 1995·76 cites·22 claims
- 0487US5083896AObject handling deviceTOKYO OHKA KOGYO CO LTD·Filed 1989·Granted Jan 28, 1992·76 cites·8 claims
- 0585US5364488ACoaxial plasma processing apparatusTOKYO OHKA KOGYO CO LTD·Filed 1992·Granted Nov 15, 1994·47 cites·16 claims
- 0674US4749436AEquipment for thermal stabilization process of photoresist pattern on semiconductor waferTOKYO OHKA KOGYO CO LTD·Filed 1987·Granted Jun 7, 1988·23 cites·6 claims
- 0763US4868096ASurface treatment of silicone-based coating filmsTOKYO OHKA KOGYO CO LTD·Filed 1987·Granted Sep 19, 1989·16 cites·10 claims
- 0856US5344536AMethod of and apparatus for processing a workpiece in plasmaTOKYO OHKA KOGYO CO LTD·Filed 1992·Granted Sep 6, 1994·18 cites·20 claims
- 0942US6067930ACoaxial plasma processing apparatusTOKYO OHKA KOGYO CO LTD·Filed 1992·Granted May 30, 2000·13 cites·18 claims
- 1035US5709519APlasma processing apparatusTOKYO OHKA KOGYO CO LTD·Filed 1993·Granted Jan 20, 1998·9 cites·23 claims
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