Inventor · disambiguated record
Taro Sugihara
Also filed as: SUGIHARA TARO
10 granted patents·3 pending applications·570 citations·filing 2001–2017
89Inventor score
Top patents by PatentIndex Score
13 records- 0197US8072578B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2008·Granted Dec 6, 2011·551 cites·5 claims
- 0292US9857692B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2016·Granted Jan 2, 2018·3 cites·22 claims
- 0391US8059260B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2005·Granted Nov 15, 2011·8 cites·12 claims
- 0490US8576379B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodYASUDA MASAHIKO·Filed 2010·Granted Nov 5, 2013·4 cites·7 claims
- 0589US9298108B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2015·Granted Mar 29, 2016·2 cites·22 claims
- 0685US10222708B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Granted Mar 5, 2019·1 cites·28 claims
- 0779US9348238B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted May 24, 2016·1 cites·38 claims
- 0866US9223230B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Dec 29, 2015·0 cites·25 claims
- 0966US9223231B2Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Dec 29, 2015·0 cites·39 claims
- 1060US8054465B2Position measurement methodNIKON CORP·Filed 2008·Granted Nov 8, 2011·0 cites·10 claims
- 1158US2007216893A1Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2007·Application pending·0 cites
- 1240US2006033916A1Selection method, exposure method, selection unit, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2005·Application pending·0 cites
- 1333US2001042068A1Methods and apparatus for data classification, signal processing, position detection, image processing, and exposureNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →