Inventor · disambiguated record
Carl E. Larson
Also filed as: LARSON CARL · LARSON CARL E · LARSON CARL ERIC
19 granted patents·1 pending application·528 citations·filing 1987–2015
95Inventor score
Top patents by PatentIndex Score
20 records- 0198US4760013ASulfonium salt photoinitiatorsIBM·Filed 1987·Granted Jul 26, 1988·221 cites·7 claims
- 0297US9914816B2Methods and materials for depolymerizing polyestersIBM·Filed 2015·Granted Mar 13, 2018·15 cites·21 claims
- 0396US9255194B2Methods and materials for depolymerizing polyestersIBM·Filed 2013·Granted Feb 9, 2016·27 cites·31 claims
- 0496US6806026B2Photoresist compositionIBM·Filed 2002·Granted Oct 19, 2004·62 cites·69 claims
- 0590US7288362B2Immersion topcoat materials with improved performanceIBM·Filed 2005·Granted Oct 30, 2007·11 cites·25 claims
- 0689US5096737ALigand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin filmsIBM·Filed 1990·Granted Mar 17, 1992·71 cites·12 claims
- 0783US7767385B2Method for lithography for optimizing process conditionsIBM·Filed 2006·Granted Aug 3, 2010·7 cites·20 claims
- 0883US5220044ALigand stabilized +1 metal beta-diketonate coordination complexes and their use in chemical vapor deposition of metal thin filmsIBM·Filed 1992·Granted Jun 15, 1993·50 cites·5 claims
- 0982US7585609B2Bilayer film including an underlayer having vertical acid transport propertiesIBM·Filed 2006·Granted Sep 8, 2009·5 cites·19 claims
- 1082US7135595B2Photoresist compositionIBM·Filed 2006·Granted Nov 14, 2006·4 cites·1 claims
- 1176US7014980B2Photoresist compositionIBM·Filed 2004·Granted Mar 21, 2006·10 cites·29 claims
- 1265US8945808B2Self-topcoating resist for photolithographyDAVID ROBERT ALLEN·Filed 2006·Granted Feb 3, 2015·3 cites·16 claims
- 1364US7807340B2Photoresists for visible light imagingIBM·Filed 2008·Granted Oct 5, 2010·1 cites·25 claims
- 1458US7160665B2Method for employing vertical acid transport for lithographic imaging applicationsIBM·Filed 2002·Granted Jan 9, 2007·4 cites·5 claims
- 1557US5407710ALaser interconnection of circuits on transparent substrateIBM·Filed 1993·Granted Apr 18, 1995·20 cites·3 claims
- 1657US4775608AGeneration of capacitive servo patterns on magnetic storage disksIBM·Filed 1987·Granted Oct 4, 1988·10 cites·4 claims
- 1753US8034532B2High contact angle topcoat material and use thereof in lithography processIBM·Filed 2006·Granted Oct 11, 2011·4 cites·17 claims
- 1849US7855045B2Immersion topcoat materials with improved performanceIBM·Filed 2007·Granted Dec 21, 2010·2 cites·13 claims
- 1947US2007117040A1Water castable-water strippable top coats for 193 nm immersion lithographyIBM·Filed 2005·Application pending·0 cites
- 2044US7354692B2Photoresists for visible light imagingIBM·Filed 2005·Granted Apr 8, 2008·1 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →