Inventor · disambiguated record
Koukou Suu
Also filed as: SUU KOUKOU
23 granted patents·32 pending applications·97 citations·filing 2000–2023
94Inventor score
Top patents by PatentIndex Score
55 records- 0188US7728252B2Etching method and systemULVAC INC·Filed 2005·Granted Jun 1, 2010·12 cites·9 claims
- 0279US12021229B2Multifunctional engineered particle for a secondary battery and method of manufacturing the sameULVAC TECH INC·Filed 2023·Granted Jun 25, 2024·0 cites·22 claims
- 0376US7618493B2Device and method for manufacturing thin filmsULVAC INC·Filed 2004·Granted Nov 17, 2009·17 cites·23 claims
- 0476US6682772B1High temperature deposition of Pt/TiOx for bottom electrodesRAMTRON INT CORP·Filed 2000·Granted Jan 27, 2004·22 cites·9 claims
- 0575US6933010B2Mixer, and device and method for manufacturing thin-filmULVAC INC·Filed 2002·Granted Aug 23, 2005·16 cites·20 claims
- 0670US11894547B2Multifunctional engineered particle for a secondary battery and method of manufacturing the sameULVAC TECH INC·Filed 2020·Granted Feb 6, 2024·0 cites·33 claims
- 0765US8118935B2Mixing box, and apparatus and method for producing filmsYAMADA TAKAKAZU·Filed 2005·Granted Feb 21, 2012·2 cites·7 claims
- 0864US9145605B2Thin-film forming method and thin-film forming apparatusMASUDA TAKESHI·Filed 2011·Granted Sep 29, 2015·2 cites·8 claims
- 0963US8591655B2Apparatus for the preparation of filmMASUDA TAKESHI·Filed 2003·Granted Nov 26, 2013·6 cites·10 claims
- 1062US9343207B2Resistance change device, and method for producing sameFUKUDA NATSUKI·Filed 2013·Granted May 17, 2016·3 cites·10 claims
- 1161US8153926B2Etching method and systemMORIKAWA YASUHIRO·Filed 2010·Granted Apr 10, 2012·1 cites·11 claims
- 1259US9059105B2Ashing apparatusUEDA MASAHISA·Filed 2007·Granted Jun 16, 2015·2 cites·13 claims
- 1358US8993449B2Etching methodMORIKAWA YASUHIRO·Filed 2010·Granted Mar 31, 2015·1 cites·11 claims
- 1458US6521105B2Sputtering apparatusULVAC INC·Filed 2001·Granted Feb 18, 2003·3 cites·6 claims
- 1555US8262798B2Shower head, device and method for manufacturing thin filmsYAMADA TAKAKAZU·Filed 2004·Granted Sep 11, 2012·6 cites·14 claims
- 1655US8168001B2Film-forming apparatus and film-forming methodUCHIDA HIROTO·Filed 2003·Granted May 1, 2012·3 cites·15 claims
- 1754US2010032290A1Method for forming chalcogenide film and method for manufacturing recording elementULVAC INC·Filed 2008·Application pending·0 cites
- 1853US10770656B2Method for manufacturing phase change memoryIBM·Filed 2018·Granted Sep 8, 2020·0 cites·18 claims
- 1953US9269903B2Method of manufacturing variable resistance element and apparatus for manufacturing the sameNISHIOKA YUTAKA·Filed 2012·Granted Feb 23, 2016·1 cites·8 claims
- 2053US2010038234A1Method for Forming Multilayer Film and Apparatus for Forming Multilayer FilmULVAC INC·Filed 2007·Application pending·0 cites
- 2148US9466475B2Ashing deviceULVAC INC·Filed 2014·Granted Oct 11, 2016·0 cites·8 claims
- 2247US2010193131A1Ashing deviceULVAC INC·Filed 2008·Application pending·0 cites
- 2347US2011180388A1Plasma Processing Method and Plasma Processing ApparatusULVAC INC·Filed 2008·Application pending·0 cites
- 2447US2010314599A1Chalcogenide film and method of manufacturing sameULVAC INC·Filed 2008·Application pending·0 cites
- 2546US2011198555A1Chalcogenide film and manufacturing method thereofULVAC INC·Filed 2008·Application pending·0 cites
- 2646US2010062606A1Dry etching methodULVAC INC·Filed 2008·Application pending·0 cites
- 2745US2009261066A1Apparatus and method for dry etchingULVAC INC·Filed 2007·Application pending·0 cites
- 2844US2009294280A1Multilayer Film Forming Method and Multilayer Film Forming ApparatusULVAC INC·Filed 2007·Application pending·0 cites
- 2944US2009311417A1Film forming method and film forming apparatusULVAC INC·Filed 2007·Application pending·0 cites
- 3044US2009277873A1Dry etching methodULVC INC·Filed 2007·Application pending·0 cites
- 3143US2010213170A1Etching method and etching apparatusULVAC INC·Filed 2008·Application pending·0 cites
- 3243US2015056373A1Deposition method and deposition apparatusFUKUDA NATSUKI·Filed 2013·Application pending·0 cites
- 3343US2010133235A1Dry etching apparatus and dry etching methodMORIKAWA YASUHIRO·Filed 2008·Application pending·0 cites
- 3442US2009275146A1Method and apparatus for manufacturing deviceULVAC INC·Filed 2009·Application pending·0 cites
- 3541US2011117742A1Plasma processing methodULVAC INC·Filed 2009·Application pending·0 cites
- 3641US2010219158A1Method for dry etching interlayer insulating filmMORIKAWA YASUHIRO·Filed 2007·Application pending·0 cites
- 3741US2010151150A1Plasma processing apparatus and manufacturing method of deposition-inhibitory memberULVAC INC·Filed 2008·Application pending·0 cites
- 3839US9985196B2Multi-layered film and method of manufacturing the sameULVAC INC·Filed 2015·Granted May 29, 2018·0 cites·5 claims
- 3939US2010133233A1Dry etching methodMORIKAWA YASUHIRO·Filed 2008·Application pending·0 cites
- 4039US2008026539A1Capacitance element manufacturing method and etching methodULVAC INC·Filed 2007·Application pending·0 cites
- 4137US8133325B2Dry cleaning method for plasma processing apparatusUEDA MASAHISA·Filed 2008·Granted Mar 13, 2012·0 cites·7 claims
- 4237US2013023062A1Thin film manufacturing apparatus, thin film manufacturing method and method for manufacturing semiconductor deviceMASUDA TAKESHI·Filed 2010·Application pending·0 cites
- 4336US2012305391A1MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY AND SPUTTERING TARGETKIM POONG·Filed 2010·Application pending·0 cites
- 4436US2012305392A1MANUFACTURING METHOD FOR LiCoO2, SINTERED BODY AND SPUTTERING TARGETKIM POONG·Filed 2010·Application pending·0 cites
- 4535US10553777B2Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the sameULVAC INC·Filed 2015·Granted Feb 4, 2020·0 cites·1 claims
- 4635US2002000197A1Vacuum processing apparatus and multi-chamber vacuum processing apparatusFiled 2001·Application pending·0 cites
- 4733US2013216710A1Thin film forming method and thin film forming apparatusMASUDA TAKESHI·Filed 2011·Application pending·0 cites
- 4833US2007054472A1Apparatus for preparing oxide thin film and method for preparing the sameNISHIOKA YUTAKA·Filed 2004·Application pending·0 cites
- 4932US2018057929A1Method of Depositing Aluminum Oxide Film, Method of Forming the Same, and Sputtering ApparatusULVAC INC·Filed 2016·Application pending·0 cites
- 5031US9281477B2Resistance change element and method for producing the sameNISHIOKA YUTAKA·Filed 2012·Granted Mar 8, 2016·0 cites·3 claims
Showing the top 50 of 55 patent records by PatentIndex Score.
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