Inventor · disambiguated record
Takakazu Yamada
Also filed as: YAMADA TAKAKAZU
9 granted patents·5 pending applications·57 citations·filing 2001–2018
86Inventor score
Top patents by PatentIndex Score
14 records- 0181US8197599B2Gas head and thin-film manufacturing apparatusYAMADA TAKAKAZU·Filed 2006·Granted Jun 12, 2012·5 cites·10 claims
- 0276US7618493B2Device and method for manufacturing thin filmsULVAC INC·Filed 2004·Granted Nov 17, 2009·17 cites·23 claims
- 0375US6933010B2Mixer, and device and method for manufacturing thin-filmULVAC INC·Filed 2002·Granted Aug 23, 2005·16 cites·20 claims
- 0471US8747555B2Thin film production apparatus and inner block for thin film production apparatusYAMADA TAKAKAZU·Filed 2007·Granted Jun 10, 2014·2 cites·16 claims
- 0565US8118935B2Mixing box, and apparatus and method for producing filmsYAMADA TAKAKAZU·Filed 2005·Granted Feb 21, 2012·2 cites·7 claims
- 0663US8591655B2Apparatus for the preparation of filmMASUDA TAKESHI·Filed 2003·Granted Nov 26, 2013·6 cites·10 claims
- 0755US8262798B2Shower head, device and method for manufacturing thin filmsYAMADA TAKAKAZU·Filed 2004·Granted Sep 11, 2012·6 cites·14 claims
- 0855US8168001B2Film-forming apparatus and film-forming methodUCHIDA HIROTO·Filed 2003·Granted May 1, 2012·3 cites·15 claims
- 0948US2011318505A1Method for forming tantalum nitride film and film-forming apparatus for forming the sameYAMAMOTO AKIKO·Filed 2009·Application pending·0 cites
- 1044US2010000673A1Film forming method and film forming apparatusULVAC INC·Filed 2007·Application pending·0 cites
- 1144US2009311417A1Film forming method and film forming apparatusULVAC INC·Filed 2007·Application pending·0 cites
- 1241US11189482B2Thin film formation methodULVAC INC·Filed 2018·Granted Nov 30, 2021·0 cites·11 claims
- 1335US2002000197A1Vacuum processing apparatus and multi-chamber vacuum processing apparatusFiled 2001·Application pending·0 cites
- 1433US2007054472A1Apparatus for preparing oxide thin film and method for preparing the sameNISHIOKA YUTAKA·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →