Inventor · disambiguated record
Shaoyu Lu
Also filed as: LU SHAOYU
2 granted patents·9 citations·filing 2016–2018
48Inventor score
Technology areasG06T
Files withKLA TENCOR CORP2
Top patents by PatentIndex Score
2 records- 0187US10789703B2Semi-supervised anomaly detection in scanning electron microscope imagesKLA TENCOR CORP·Filed 2018·Granted Sep 29, 2020·9 cites·20 claims
- 0240US10074167B2Reducing registration and design vicinity induced noise for intra-die inspectionKLA TENCOR CORP·Filed 2016·Granted Sep 11, 2018·0 cites·18 claims
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