Inventor · disambiguated record
Tomohito Komatsu
Also filed as: KOMATSU TOMOHITO
18 granted patents·10 pending applications·92 citations·filing 2004–2022
91Inventor score
Top patents by PatentIndex Score
28 records- 0186USD589471SHeater for manufacturing semiconductorTOKYO ELECTRON LTD·Filed 2007·Granted Mar 31, 2009·37 cites·1 claims
- 0282USD601521SHeater for manufacturing semiconductorTOKYO ELECTRON LTD·Filed 2007·Granted Oct 6, 2009·30 cites·1 claims
- 0376US9520272B2Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Dec 13, 2016·3 cites·15 claims
- 0475US9543123B2Plasma processing apparatus and plasma generation antennaIKEDA TARO·Filed 2012·Granted Jan 10, 2017·1 cites·7 claims
- 0573US7299566B2Substrate-placing mechanism having substrate-heating functionTOKYO ELECTRON LTD·Filed 2006·Granted Nov 27, 2007·4 cites·8 claims
- 0673US2022277935A1Microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0771US9552966B2Antenna for plasma generation, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2012·Granted Jan 24, 2017·2 cites·16 claims
- 0870US8334481B2Mounting table structure, and processing apparatusKOMATSU TOMOHITO·Filed 2009·Granted Dec 18, 2012·4 cites·7 claims
- 0969US2019189398A1Microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1063US9548187B2Microwave radiation antenna, microwave plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jan 17, 2017·1 cites·7 claims
- 1163US8203104B2Mounting table structure and heat treatment apparatusKOMATSU TOMOHITO·Filed 2008·Granted Jun 19, 2012·2 cites·24 claims
- 1260US10557200B2Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plateTOKYO ELECTRON LTD·Filed 2014·Granted Feb 11, 2020·1 cites·6 claims
- 1358US7488374B2Trapping device, processing system, and method removing impuritiesTOKYO ELECTRON LTD·Filed 2004·Granted Feb 10, 2009·7 cites·17 claims
- 1451US2019075644A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1547US10211032B2Microwave plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 19, 2019·0 cites·9 claims
- 1646US9991097B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jun 5, 2018·0 cites·6 claims
- 1744US11164730B2Plasma probe device and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 2, 2021·0 cites·11 claims
- 1843US8055125B2Substrate stage mechanism and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Nov 8, 2011·0 cites·20 claims
- 1943US2006160359A1Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 2042US2009139979A1Placing table structure, method for manufacturing placing table structure and heat treatment apparatusTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 2139US2010186673A1Vaporizer, material gas supply system including vaporizer and film forming apparatus using such systemTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 2238US11508556B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 22, 2022·0 cites·11 claims
- 2336US10804078B2Plasma processing apparatus and gas introduction mechanismTOKYO ELECTRON LTD·Filed 2017·Granted Oct 13, 2020·0 cites·13 claims
- 2436US10727030B2Microwave plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 28, 2020·0 cites·16 claims
- 2536US2011005686A1Loading table structure and processing deviceTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 2634US2015348758A1Impedance matching slug, impedance matching device, electromagnetic wave transmission device, electromagnetic wave radiation device, and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 2733US2012031889A1Mounting table structure and processing apparatusKOMATSU TOMOHITO·Filed 2010·Application pending·0 cites
- 2829US2012145697A1Heat treatment apparatusKOMATSU TOMOHITO·Filed 2010·Application pending·0 cites
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