Inventor · disambiguated record
Lars Markwort
Also filed as: MARKWORT LARS
17 granted patents·212 citations·filing 2001–2015
93Inventor score
Top patents by PatentIndex Score
17 records- 0198US7557360B2Ion sources, systems and methodsALIS CORP·Filed 2006·Granted Jul 7, 2009·67 cites·28 claims
- 0296US8110814B2Ion sources, systems and methodsWARD BILLY W·Filed 2009·Granted Feb 7, 2012·33 cites·20 claims
- 0394US7488952B2Ion sources, systems and methodsALIS CORP·Filed 2006·Granted Feb 10, 2009·20 cites·23 claims
- 0494US7485873B2Ion sources, systems and methodsALIS CORP·Filed 2006·Granted Feb 3, 2009·36 cites·25 claims
- 0589US9236225B2Ion sources, systems and methodsCARL ZEISS MICROSCOPY LLC·Filed 2015·Granted Jan 12, 2016·4 cites·23 claims
- 0687US7064828B1Pulsed spectroscopy with spatially variable polarization modulation elementNANOMETRICS INC·Filed 2001·Granted Jun 20, 2006·33 cites·16 claims
- 0785US8102521B2Optical inspection system and methodMARKWORT LARS·Filed 2010·Granted Jan 24, 2012·7 cites·14 claims
- 0885US8072591B2Optical inspection system and methodMARKWORT LARS·Filed 2010·Granted Dec 6, 2011·7 cites·14 claims
- 0976US8748845B2Ion sources, systems and methodsWARD BILLY W·Filed 2012·Granted Jun 10, 2014·2 cites·28 claims
- 1071US9012867B2Ion sources, systems and methodsCARL ZEISS MICROSCOPY LLC·Filed 2014·Granted Apr 21, 2015·1 cites·20 claims
- 1159US8460946B2Methods of processing and inspecting semiconductor substratesMARKWORT LARS·Filed 2011·Granted Jun 11, 2013·1 cites·20 claims
- 1248US9355919B2Methods and systems for inspecting bonded wafersESTERMANN MARKUS·Filed 2011·Granted May 31, 2016·1 cites·18 claims
- 1348US8368881B2Optical inspection system and methodNANDA TECHNOLOGIES GMBH·Filed 2011·Granted Feb 5, 2013·0 cites·24 claims
- 1446US8345232B2Optical inspection system and methodNANDA TECHNOLOGIES GMBH·Filed 2010·Granted Jan 1, 2013·0 cites·17 claims
- 1538US8501503B2Methods of inspecting and manufacturing semiconductor wafersMARKWORT LARS·Filed 2012·Granted Aug 6, 2013·0 cites·32 claims
- 1636US9182357B2Semiconductor wafer inspection system and methodMARKWORT LARS·Filed 2010·Granted Nov 10, 2015·0 cites·22 claims
- 1732US8778702B2Method of inspecting and processing semiconductor wafersMARKWORT LARS·Filed 2010·Granted Jul 15, 2014·0 cites·41 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →