Inventor · disambiguated record
Brian H. Burrows
Also filed as: BURROWS BRIAN · BURROWS BRIAN H · BURROWS BRIAN HAYES
29 granted patents·29 pending applications·479 citations·filing 1997–2025
96Inventor score
Top patents by PatentIndex Score
58 records- 0197US7976631B2Multi-gas straight channel showerheadAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·247 cites·25 claims
- 0291US7976634B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 12, 2011·18 cites·15 claims
- 0388US8663390B2Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systemsCARLSON DAVID KEITH·Filed 2011·Granted Mar 4, 2014·12 cites·21 claims
- 0487US11680338B2Linear lamp array for improved thermal uniformity and profile controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 20, 2023·2 cites·14 claims
- 0587US8481118B2Multi-gas straight channel showerheadBURROWS BRIAN H·Filed 2011·Granted Jul 9, 2013·14 cites·9 claims
- 0687US5878099AApparatus for performing work in a nuclear reactorGEN ELECTRIC·Filed 1997·Granted Mar 2, 1999·35 cites·14 claims
- 0786US9267205B1Fastener system for supporting a liner plate in a gas showerhead reactorISHIKAWA DAVID·Filed 2012·Granted Feb 23, 2016·7 cites·15 claims
- 0886US8183132B2Methods for fabricating group III nitride structures with a cluster toolNIJHAWAN SANDEEP·Filed 2010·Granted May 22, 2012·12 cites·23 claims
- 0983US9644267B2Multi-gas straight channel showerheadAPPLIED MATERIALS INC·Filed 2013·Granted May 9, 2017·6 cites·20 claims
- 1081US11578004B2Methods and apparatus for depositing materials on a continuous substrateAPPLIED MATERIALS INC·Filed 2017·Granted Feb 14, 2023·1 cites·15 claims
- 1181US8657994B2System and method for improved epitaxial lift offBURROWS BRIAN·Filed 2011·Granted Feb 25, 2014·7 cites·9 claims
- 1281US6145673AWafer transfer cassetteAPPLIED MATERIALS INC·Filed 1999·Granted Nov 14, 2000·69 cites·6 claims
- 1379US7704327B2High temperature anneal with improved substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted Apr 27, 2010·18 cites·1 claims
- 1479US2025132155A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1579US2025087485A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1676US2025101629A1Multi-layer epi chamber bodyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1775US11807931B2Chamber injectorAPPLIED MATERIALS INC·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 1875US10932323B2Reflector and susceptor assembly for chemical vapor deposition reactorALTA DEVICES INC·Filed 2015·Granted Feb 23, 2021·1 cites·22 claims
- 1974US2025293027A1Chamber body feedthrough for in chamber resistive heating elementAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2073US2024318351A1Multi-thermal cvd chambers with shared gas delivery and exhaust systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2173US2025275015A1Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2270US12324061B2Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 3, 2025·0 cites·20 claims
- 2370US11492704B2Chamber injectorAPPLIED MATERIALS INC·Filed 2019·Granted Nov 8, 2022·0 cites·20 claims
- 2470US9381731B2Epitaxial lift off systems and methodsALTA DEVICES INC·Filed 2014·Granted Jul 5, 2016·2 cites·14 claims
- 2570US6807972B2Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamberAPPLIED MATERIALS INC·Filed 2002·Granted Oct 26, 2004·13 cites·12 claims
- 2669US11189508B2Purged viewport for quartz dome in epitaxy reactorAPPLIED MATERIALS INC·Filed 2019·Granted Nov 30, 2021·1 cites·15 claims
- 2768US12334341B2Chamber body feedthrough for in chamber resistive heating elementAPPLIED MATERIALS INC·Filed 2022·Granted Jun 17, 2025·0 cites·20 claims
- 2863US12037701B2Multi-thermal CVD chambers with shared gas delivery and exhaust systemAPPLIED MATERIALS INC·Filed 2021·Granted Jul 16, 2024·0 cites·16 claims
- 2961US12188148B2Multi-layer EPI chamber bodyAPPLIED MATERIALS INC·Filed 2020·Granted Jan 7, 2025·0 cites·20 claims
- 3061US10259206B2Epitaxial lift off systems and methodsBROWN BRIAN·Filed 2011·Granted Apr 16, 2019·1 cites·18 claims
- 3161US5864595AActuator for facilitating performance of work in a nuclear reactorGEN ELECTRIC·Filed 1997·Granted Jan 26, 1999·13 cites·17 claims
- 3260US2022157604A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3357US2025316454A1Remote plasma sourcesAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3456US2015155407A1Methods for substrate processingAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3554US2017362702A9Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature cvd systemsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3653US10995419B2Methods and apparatus for gallium nitride depositionAPPLIED MATERIALS INC·Filed 2019·Granted May 4, 2021·0 cites·20 claims
- 3753US9142707B2System and method for improved epitaxial lift offALTA DEVICES INC·Filed 2014·Granted Sep 22, 2015·0 cites·14 claims
- 3852US2010215854A1Hvpe showerhead designBURROWS BRIAN H·Filed 2010·Application pending·0 cites
- 3950US2008289575A1Methods and apparatus for depositing a group iii-v film using a hydride vapor phase epitaxy processBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 4050US2008314317A1Showerhead design with precursor pre-mixingBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 4150US2008276860A1Cross flow apparatus and method for hydride vapor phase depositionBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 4249US2020291523A1Continuous chemical vapor deposition (cvd) multi-zone process kitAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4348US11117194B2Additive manufacturing having energy beam and lamp arrayAPPLIED MATERIALS INC·Filed 2018·Granted Sep 14, 2021·0 cites·13 claims
- 4447US2023167581A1Wafer edge temperature correction in batch thermal process chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4547US2011076400A1Nanocrystalline diamond-structured carbon coating of silicon carbideAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4647US2008314311A1Hvpe showerhead designBURROWS BRIAN H·Filed 2007·Application pending·0 cites
- 4747US2019132910A1Tool architecture using variable frequency microwave for residual moisture removal of electrodesAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4845US2009194024A1Cvd apparatusAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 4943US2008072820A1Modular cvd epi 300mm reactorAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 5042US2009194026A1Processing system for fabricating compound nitride semiconductor devicesBURROWS BRIAN H·Filed 2008·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
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