Inventor · disambiguated record
Eda Tuncel
Also filed as: TUNCEL EDA
4 granted patents·2 pending applications·20 citations·filing 2002–2023
70Inventor score
Top patents by PatentIndex Score
6 records- 0175US10896833B2Methods and apparatus for detecting an endpoint of a seasoning processAPPLIED MATERIALS INC·Filed 2019·Granted Jan 19, 2021·3 cites·20 claims
- 0272US8293656B2Selective self-aligned double patterning of regions in an integrated circuit deviceKIM HUN SANG·Filed 2009·Granted Oct 23, 2012·8 cites·19 claims
- 0362US7105442B2Ashable layers for reducing critical dimensions of integrated circuit featuresAPPLIED MATERIALS INC·Filed 2002·Granted Sep 12, 2006·9 cites·8 claims
- 0461US2024427324A1Integrated hybrid predictive monitoring of manufacturing systemsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0554US9303318B2Multiple complementary gas distribution assembliesAPPLIED MATERIALS INC·Filed 2012·Granted Apr 5, 2016·0 cites·19 claims
- 0640US2009057266A1Line edge roughness controlTUNCEL EDA·Filed 2007·Application pending·0 cites
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