Inventor · disambiguated record
Sergey Kamensky
Also filed as: KAMENSKY SERGEY
8 granted patents·41 citations·filing 2011–2017
84Inventor score
Top patents by PatentIndex Score
8 records- 0190US9702829B1Systems and methods for wafer surface feature detection and quantificationKLA TENCOR CORP·Filed 2014·Granted Jul 11, 2017·12 cites·25 claims
- 0288US10352691B1Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry toolKLA TENCOR CORP·Filed 2014·Granted Jul 16, 2019·10 cites·22 claims
- 0385US9546862B2Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry toolKLA TENCOR CORP·Filed 2012·Granted Jan 17, 2017·6 cites·14 claims
- 0479US9177370B2Systems and methods of advanced site-based nanotopography for wafer surface metrologyKLA TENCOR CORP·Filed 2013·Granted Nov 3, 2015·5 cites·52 claims
- 0578US10379061B1Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry toolKLA TENCOR CORP·Filed 2017·Granted Aug 13, 2019·2 cites·14 claims
- 0673US9031810B2Methods and systems of object based metrology for advanced wafer surface nanotopographyCHEN HAIGUANG·Filed 2011·Granted May 12, 2015·3 cites·13 claims
- 0763US8630479B2Methods and systems for improved localized feature quantification in surface metrology toolsCHEN HAIGUANG·Filed 2011·Granted Jan 14, 2014·2 cites·19 claims
- 0861US10330608B2Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology toolsCHEN HAIGUANG·Filed 2012·Granted Jun 25, 2019·1 cites·25 claims
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