Inventor · disambiguated record
Nihar Mohanty
Also filed as: MOHANTY NIHAR · MOHANTY NIHAR RANJAN
57 granted patents·19 pending applications·673 citations·filing 2010–2025
98Inventor score
Files withFACEBOOK TECH LLC33TOKYO ELECTRON LTD29META PLATFORMS TECH LLC12BERRY VIKAS1FACEBOOK TECHNOLOGIES LLC1
Top patents by PatentIndex Score
76 records- 0199US11579364B2Gratings with variable depths formed using planarization for waveguide displaysMETA PLATFORMS TECH LLC·Filed 2022·Granted Feb 14, 2023·5 cites·7 claims
- 0298US11307357B2Overcoating slanted surface-relief structures using atomic layer depositionFACEBOOK TECH LLC·Filed 2019·Granted Apr 19, 2022·38 cites·16 claims
- 0398US11249230B2Duty cycle, depth, and surface energy control in nano fabricationFACEBOOK TECH LLC·Filed 2020·Granted Feb 15, 2022·5 cites·19 claims
- 0498US10732351B2Gratings with variable depths formed using planarization for waveguide displaysFACEBOOK TECH LLC·Filed 2018·Granted Aug 4, 2020·45 cites·7 claims
- 0598US10649119B2Duty cycle, depth, and surface energy control in nano fabricationFACEBOOK TECH LLC·Filed 2018·Granted May 12, 2020·42 cites·14 claims
- 0698US9786503B2Method for increasing pattern density in self-aligned patterning schemes without using hard masksTOKYO ELECTRON LTD·Filed 2016·Granted Oct 10, 2017·45 cites·20 claims
- 0797US10354873B2Organic mandrel protection processTOKYO ELECTRON LTD·Filed 2017·Granted Jul 16, 2019·340 cites·20 claims
- 0897US9997598B2Three-dimensional semiconductor device and method of fabricationTOKYO ELECTRON LTD·Filed 2017·Granted Jun 12, 2018·26 cites·20 claims
- 0996US10895671B1Diffraction grating with a variable refractive index using ion implantationFACEBOOK TECH LLC·Filed 2018·Granted Jan 19, 2021·9 cites·20 claims
- 1096US10649141B1Gratings with variable etch heights for waveguide displaysFACEBOOK TECH LLC·Filed 2018·Granted May 12, 2020·15 cites·21 claims
- 1196US10529830B2Extension region for a semiconductor deviceTOKYO ELECTRON LTD·Filed 2017·Granted Jan 7, 2020·16 cites·14 claims
- 1295US11455031B1In-field illumination for eye trackingMETA PLATFORMS TECH LLC·Filed 2018·Granted Sep 27, 2022·13 cites·20 claims
- 1395US11175455B1Gratings with variable etch heights for waveguide displaysFACEBOOK TECH LLC·Filed 2020·Granted Nov 16, 2021·3 cites·20 claims
- 1494US10976483B2Variable-etch-depth gratingsFACEBOOK TECH LLC·Filed 2020·Granted Apr 13, 2021·3 cites·25 claims
- 1592US10930764B2Extension region for a semiconductor deviceTOKYO ELECTRON LTD·Filed 2019·Granted Feb 23, 2021·6 cites·20 claims
- 1691US11709422B2Gray-tone lithography for precise control of grating etch depthMETA PLATFORMS TECH LLC·Filed 2020·Granted Jul 25, 2023·2 cites·20 claims
- 1790US10684407B2Reactivity enhancement in ion beam etcherFACEBOOK TECH LLC·Filed 2018·Granted Jun 16, 2020·5 cites·15 claims
- 1889US11067726B2Gratings with variable depths for waveguide displaysFACEBOOK TECH LLC·Filed 2018·Granted Jul 20, 2021·2 cites·6 claims
- 1989US10502958B2H2-assisted slanted etching of high refractive index materialFACEBOOK TECH LLC·Filed 2018·Granted Dec 10, 2019·4 cites·20 claims
- 2088US11137536B2Bragg-like gratings on high refractive index materialFACEBOOK TECH LLC·Filed 2018·Granted Oct 5, 2021·5 cites·17 claims
- 2186US10845526B1Outward coupling suppression in waveguide displayFACEBOOK TECH LLC·Filed 2019·Granted Nov 24, 2020·4 cites·20 claims
- 2286US10319637B2Method for fully self-aligned via formation using a directed self assembly (DSA) processTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·5 cites·21 claims
- 2385US11226446B2Hydrogen/nitrogen doping and chemically assisted etching of high refractive index gratingsFACEBOOK TECH LLC·Filed 2020·Granted Jan 18, 2022·1 cites·20 claims
- 2485US11150394B2Duty cycle range increase for waveguide combinersFACEBOOK TECH LLC·Filed 2019·Granted Oct 19, 2021·3 cites·10 claims
- 2584US11402578B2Gratings with variable depths formed using planarization for waveguide displaysFACEBOOK TECH LLC·Filed 2020·Granted Aug 2, 2022·1 cites·12 claims
- 2684US9748110B2Method and system for selective spacer etch for multi-patterning schemesTOKYO ELECTRON LTD·Filed 2016·Granted Aug 29, 2017·4 cites·10 claims
- 2782US11509260B1Reclamation of energy leaking from waveguidesMETA PLATFORMS TECH LLC·Filed 2018·Granted Nov 22, 2022·2 cites·20 claims
- 2882US9812325B2Method for modifying spacer profileTOKYO ELECTRON LTD·Filed 2016·Granted Nov 7, 2017·3 cites·12 claims
- 2981US10838121B1Manufacturing three-dimensional diffraction gratings by selective deposition or selective etchingFACEBOOK TECH LLC·Filed 2019·Granted Nov 17, 2020·2 cites·14 claims
- 3079US2022128903A1Nanoimprint lithography processes for switching mechanical properties of imprint materialsFACEBOOK TECH LLC·Filed 2022·Application pending·0 cites
- 3178US10256140B2Method of reducing overlay error in via to grid patterningTOKYO ELECTRON LTD·Filed 2017·Granted Apr 9, 2019·2 cites·15 claims
- 3278US9991133B2Method for etch-based planarization of a substrateTOKYO ELECTRON LTD·Filed 2017·Granted Jun 5, 2018·3 cites·20 claims
- 3378US2022026799A1Nanoimprint lithography process using low surface energy maskFACEBOOK TECH LLC·Filed 2021·Application pending·0 cites
- 3477US10971372B2Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masksTOKYO ELECTRON LTD·Filed 2016·Granted Apr 6, 2021·2 cites·17 claims
- 3577US10256110B2Self-aligned patterning process utilizing self-aligned blocking and spacer self-healingTOKYO ELECTRON LTD·Filed 2017·Granted Apr 9, 2019·2 cites·20 claims
- 3677US2025244663A1Method for reducing lithography defects and pattern transferTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3775US12265326B2Method for reducing lithography defects and pattern transferTOKYO ELECTRON LTD·Filed 2022·Granted Apr 1, 2025·0 cites·12 claims
- 3874US11099309B2Outward coupling suppression in waveguide displayFACEBOOK TECH LLC·Filed 2019·Granted Aug 24, 2021·1 cites·12 claims
- 3971US10083842B2Methods of sub-resolution substrate patterningTOKYO ELECTRON LTD·Filed 2017·Granted Sep 25, 2018·1 cites·17 claims
- 4071US9520270B2Direct current superposition curing for resist reflow temperature enhancementTOKYO ELECTRON LTD·Filed 2014·Granted Dec 13, 2016·2 cites·12 claims
- 4170US10580650B2Method for bottom-up formation of a film in a recessed featureTOKYO ELECTRON LTD·Filed 2017·Granted Mar 3, 2020·1 cites·20 claims
- 4270US10366890B2Method for patterning a substrate using a layer with multiple materialsTOKYO ELECTRON LTD·Filed 2017·Granted Jul 30, 2019·1 cites·15 claims
- 4370US2021373227A1Reactivity enhancement in ion beam etcherFACEBOOK TECH LLC·Filed 2021·Application pending·0 cites
- 4469US11249393B2Nanoimprint lithography processes for switching mechanical properties of imprint materialsFACEBOOK TECH LLC·Filed 2019·Granted Feb 15, 2022·0 cites·1 claims
- 4569US11156913B2Nanoimprint lithography process using low surface energy maskFACEBOOK TECH LLC·Filed 2019·Granted Oct 26, 2021·0 cites·10 claims
- 4668US11422293B2Outward coupling suppression in waveguide displayFACEBOOK TECH LLC·Filed 2021·Granted Aug 23, 2022·0 cites·19 claims
- 4768US11415880B2Nanoimprint lithography material with switchable mechanical propertiesFACEBOOK TECH LLC·Filed 2019·Granted Aug 16, 2022·0 cites·6 claims
- 4868US2021294006A1Gratings with variable depths for waveguide displaysFACEBOOK TECH LLC·Filed 2021·Application pending·0 cites
- 4967US10236186B2Methods for dry hard mask removal on a microelectronic substrateTOKYO ELECTRON LTD·Filed 2015·Granted Mar 19, 2019·1 cites·20 claims
- 5067US10141183B2Methods of spin-on deposition of metal oxidesTOKYO ELECTRON LTD·Filed 2017·Granted Nov 27, 2018·1 cites·16 claims
Showing the top 50 of 76 patent records by PatentIndex Score.
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