Inventor · disambiguated record

Fen Dai

Also filed as: DAI FEN

8 granted patents·242 citations·filing 19982019

88Inventor score
Technology areasB24BH04LH10PB24DG06F
Files withLAM RES CORP3HUAWEI TECH CO LTD2DAI FEN1MATTSON TECH INC1SPEEDFAM IPEC1

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